发明公开
EP1667778A4 SINGLE PHASE FLUID IMPRINT LITHOGRAPHY METHOD 有权
EINZELPHASENLFUID压印光刻法

SINGLE PHASE FLUID IMPRINT LITHOGRAPHY METHOD
摘要:
The present invention is directed toward a method for reducing pattern distortions in imprinting layers by reducing gas pockets present in a layer of viscous liquid deposited on a substrate. To that end, the method includes varying the transport of gases disposed proximate to the viscous liquid. Specifically, the atmosphere proximate to the substrate wherein a pattern is to be recorded is saturated with gases that are either highly soluble, highly diffusive, or both with respect to the viscous liquid being deposited. Additionally, or in lieu of saturating the atmosphere, the pressure of the atmosphere may be reduced.
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