发明公开
- 专利标题: MEMS switch and method of fabricating the same
- 专利标题(中): MEMS开关及其制造方法
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申请号: EP05024606.5申请日: 2005-11-10
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公开(公告)号: EP1672661A2公开(公告)日: 2006-06-21
- 发明人: Kim, Che-heung , Shin, Hyung-jae , Kweon, Soon-cheol , Kim, Kyu-sik , Lee, Sang-hun
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: 416 Maetan-Dong, Yeongtong-Gu Suwon-si, Gyeonggi-Do KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: 416 Maetan-Dong, Yeongtong-Gu Suwon-si, Gyeonggi-Do KR
- 代理机构: Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät
- 优先权: KR2004107857 20041217
- 主分类号: H01H59/00
- IPC分类号: H01H59/00
摘要:
A micro electro mechanical system switch and a method of fabricating the micro electro mechanical system switch. The micro electro mechanical system switch includes a substrate, a plurality of signal lines formed on the substrate and including switching contact points and a plurality of immovable electrodes formed among the signal lines on the substrate. A plurality of anchors protrude from the substrate to predetermined heights and support at least two actuating beams installed on an identical plane so as to move up and down. A connecting unit connects the at least two actuating beams. A support unit provided on the substrate supports the connecting unit and contacting plates are installed on lower surfaces of the at least two actuating beams so as to contact the switching contact points.
公开/授权文献
- EP1672661A3 MEMS switch and method of fabricating the same 公开/授权日:2007-08-29
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