发明公开
EP1696479A1 Contactor for reliability evaluation tester
审中-公开
KontaktorfürZuverlässigkeitsbewertungstester
- 专利标题： Contactor for reliability evaluation tester
- 专利标题（中）： KontaktorfürZuverlässigkeitsbewertungstester
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申请号： EP06009917.3申请日： 2002-11-27
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公开(公告)号： EP1696479A1公开(公告)日： 2006-08-30
- 发明人: Takekoshi, Kiyoshi, TOKYO ELECTRON AT LIMITED , Hosaka, Hisatomi, TOKYO ELECTRON AT LIMITED , Hagihara, Junichi, TOKYO ELECTRON AT LIMITED , Hatsushika, Kunihiko, TOKYO ELECTRON AT LIMITED , Usui, Takamasa , Kaneko, Hisashi , Hayasaka, Nobuo , Ido, Yoshiyuki
- 申请人： TOKYO ELECTRON LIMITED , KABUSHIKI KAISHA TOSHIBA , IBIDEN CO., LTD.
- 申请人地址： Minato-ku Tokyo 107-8481 JP
- 专利权人： TOKYO ELECTRON LIMITED,KABUSHIKI KAISHA TOSHIBA,IBIDEN CO., LTD.
- 当前专利权人： TOKYO ELECTRON LIMITED,KABUSHIKI KAISHA TOSHIBA,IBIDEN CO., LTD.
- 当前专利权人地址： Minato-ku Tokyo 107-8481 JP
- 代理机构： Gleiss, Alf-Olav
- 优先权： JP2001367268 20011130
- 主分类号： H01L21/66
- IPC分类号： H01L21/66 ; G01R31/28
摘要：
A reliability evaluation test apparatus (10) of this invention includes a wafer storage section (12) which stores a wafer (W) in a state wherein the electrode pads of a number of devices formed on the wafer and the bumps of a contactor (11) are totally in electrical contact with each other. The wafer storage section (12) transmits/receives a test signal to/from a measurement section (15) and has a hermetic and heat insulating structure. The wafer storage section (12) has a pressure mechanism (13) which presses the contactor (11) and a heating mechanism (14) which directly heats the wafer (W) totally in contact with the contactor (11) to a predetermined high temperature. The reliability of an interconnection film and insulating film formed on the semiconductor wafer are evaluated under an accelerated condition.
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