发明公开
EP1708290A2 Method for producing dielectric film, method for producing piezoelectric element, method for producing liquid-jet head, dielectric film, piezoelectric element, and liquid-jet apparatus
审中-公开
一种用于生产压电元件产生的电介质膜,处理过程中,一种用于制造喷液头,一个介电膜,压电元件和液体喷射装置
- 专利标题: Method for producing dielectric film, method for producing piezoelectric element, method for producing liquid-jet head, dielectric film, piezoelectric element, and liquid-jet apparatus
- 专利标题(中): 一种用于生产压电元件产生的电介质膜,处理过程中,一种用于制造喷液头,一个介电膜,压电元件和液体喷射装置
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申请号: EP06006723.8申请日: 2006-03-30
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公开(公告)号: EP1708290A2公开(公告)日: 2006-10-04
- 发明人: Kuriki, Akira , Sumi, Koji , Kazama, Hironobu , Takabe, Motoki , Noguchi, Motohisa
- 申请人: SEIKO EPSON CORPORATION
- 申请人地址: 4-1, Nishi-Shinjuku 2-chome Shinjuku-ku, Tokyo 163-0811 JP
- 专利权人: SEIKO EPSON CORPORATION
- 当前专利权人: SEIKO EPSON CORPORATION
- 当前专利权人地址: 4-1, Nishi-Shinjuku 2-chome Shinjuku-ku, Tokyo 163-0811 JP
- 代理机构: HOFFMANN EITLE
- 优先权: JP2005104517 20050331; JP2006056096 20060302
- 主分类号: H01L41/24
- IPC分类号: H01L41/24 ; H01L41/09
摘要:
A method for producing a dielectric film, comprising: a coating step of coating a colloidal solution containing an organometallic compound containing a metal constituting a dielectric film (70) containing at least a lead component to form a dielectric precursor film (71); a drying step of drying the dielectric precursor film; a degreasing step of degreasing the dielectric precursor film; and a sintering step of sintering the dielectric precursor film to form a dielectric film, and wherein the drying step includes a first drying step of heating the dielectric precursor film to a temperature lower than the boiling point of a solvent, which is a main solvent of the material, and holding the dielectric precursor film at the temperature for a certain period of time to dry the dielectric precursor film, and a second drying step of drying the dielectric precursor film at a temperature in the range of 140°C to 170°C, the degreasing step is performed at a degreasing temperature of 350°C to 450°C and at a heating-up rate of 15 [°C/sec] or higher, and the sintering step is performed at a heating-up rate of 100 [°C/sec] to 150 [°C/sec].
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