发明公开
- 专利标题: HALBLEITERSTRUKTUR
- 专利标题(英): Semiconductor structure
- 专利标题(中): 半导体结构
-
申请号: EP05700978.9申请日: 2005-01-17
-
公开(公告)号: EP1709691A2公开(公告)日: 2006-10-11
- 发明人: LECHNER, Peter , LUTZ, Gerhard , RICHTER, Rainer , STRÜDER, Lothar
- 申请人: MPG Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V.
- 申请人地址: Hofgartenstrasse 8 80539 München DE
- 专利权人: MPG Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V.
- 当前专利权人: MPG Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V.
- 当前专利权人地址: Hofgartenstrasse 8 80539 München DE
- 代理机构: Beier, Ralph
- 优先权: DE102004004283 20040128
- 国际公布: WO2005074012 20050811
- 主分类号: H01L31/10
- IPC分类号: H01L31/10 ; H01L29/76
摘要:
The invention relates to a semiconductor structure, especially for use in a semiconductor detector. Said semiconductor structure comprises a weakly doped semiconductor substrate (HK) of a first or second doping type, a highly doped drain region (D) of a second doping type, located on a first surface of the semiconductor substrate (HK), a highly doped source region (S) of the second doping type, located on the first surface of the semiconductor substrate (HK), a duct (K) extending between the source region (S) and the drain region (D), a doped inner gate region (IG) of the first doping type, which is at least partially located below the duct (K), and a blow-out contact (CL) for removing charge carriers from the inner gate region (IG). According to the invention, the inner gate region (IG) extends in the semiconductor substrate (HK) at least partially up to the blow-out contact (CL) and the blow-out contact (CL) is located on the drain end relative to the source region (S).
公开/授权文献
- EP1709691B8 HALBLEITERSTRUKTUR 公开/授权日:2008-10-15
信息查询
IPC分类: