发明公开
EP1721339A1 METHOD AND APPARATUS FOR IN-LINE PROCESS CONTROL OF THE CIGS PROCESS
审中-公开
VERFAHREN UND VORRICHTUNG ZUR INLINE-PROZESSSTEUERUNG DES CIGS-PROZESSES
- 专利标题: METHOD AND APPARATUS FOR IN-LINE PROCESS CONTROL OF THE CIGS PROCESS
- 专利标题(中): VERFAHREN UND VORRICHTUNG ZUR INLINE-PROZESSSTEUERUNG DES CIGS-PROZESSES
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申请号: EP05722187.1申请日: 2005-03-04
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公开(公告)号: EP1721339A1公开(公告)日: 2006-11-15
- 发明人: STOLT, Lars , KESSLER, John
- 申请人: Solibro AB
- 申请人地址: Ultuna 756 51 Uppsala SE
- 专利权人: Solibro AB
- 当前专利权人: Solibro AB
- 当前专利权人地址: Ultuna 756 51 Uppsala SE
- 代理机构: Svanfeldt, Hans-Ake
- 优先权: SE0400582 20040305
- 国际公布: WO2005086238 20050915
- 主分类号: H01L31/04
- IPC分类号: H01L31/04 ; H01L31/032
摘要:
An in-line production apparatus and a method for composition control of copper indium gallium diselenide (CIGS) solar cells fabricated by a co-evaporation deposition process. The deposition conditions are so that a deposited Cu-excessive overall composition is transformed into to a Cu-deficient overall composition, the final CIGS film. Substrates with a molybdenum layer move through the process chamber with constant speed. The transition from copper rich to copper deficient composition on a substrate is detected by using sensors which detect a physical parameter related to the transition. A preferred embodiment sensors are provided that detect the composition of elements in the deposited layer. A controller connected to the sensors adjusts the fluxes from the evaporant sources in order provide a CIGS layer with uniform composition and thickness over the width of the substrate.
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