发明公开
EP1721339A1 METHOD AND APPARATUS FOR IN-LINE PROCESS CONTROL OF THE CIGS PROCESS 审中-公开
VERFAHREN UND VORRICHTUNG ZUR INLINE-PROZESSSTEUERUNG DES CIGS-PROZESSES

  • 专利标题: METHOD AND APPARATUS FOR IN-LINE PROCESS CONTROL OF THE CIGS PROCESS
  • 专利标题(中): VERFAHREN UND VORRICHTUNG ZUR INLINE-PROZESSSTEUERUNG DES CIGS-PROZESSES
  • 申请号: EP05722187.1
    申请日: 2005-03-04
  • 公开(公告)号: EP1721339A1
    公开(公告)日: 2006-11-15
  • 发明人: STOLT, LarsKESSLER, John
  • 申请人: Solibro AB
  • 申请人地址: Ultuna 756 51 Uppsala SE
  • 专利权人: Solibro AB
  • 当前专利权人: Solibro AB
  • 当前专利权人地址: Ultuna 756 51 Uppsala SE
  • 代理机构: Svanfeldt, Hans-Ake
  • 优先权: SE0400582 20040305
  • 国际公布: WO2005086238 20050915
  • 主分类号: H01L31/04
  • IPC分类号: H01L31/04 H01L31/032
METHOD AND APPARATUS FOR IN-LINE PROCESS CONTROL OF THE CIGS PROCESS
摘要:
An in-line production apparatus and a method for composition control of copper indium gallium diselenide (CIGS) solar cells fabricated by a co-evaporation deposition process. The deposition conditions are so that a deposited Cu-excessive overall composition is transformed into to a Cu-deficient overall composition, the final CIGS film. Substrates with a molybdenum layer move through the process chamber with constant speed. The transition from copper rich to copper deficient composition on a substrate is detected by using sensors which detect a physical parameter related to the transition. A preferred embodiment sensors are provided that detect the composition of elements in the deposited layer. A controller connected to the sensors adjusts the fluxes from the evaporant sources in order provide a CIGS layer with uniform composition and thickness over the width of the substrate.
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