发明公开
EP1729378A1 Gas laser apparatus 审中-公开
Gaslaservorrichtung

  • 专利标题: Gas laser apparatus
  • 专利标题(中): Gaslaservorrichtung
  • 申请号: EP06011236.4
    申请日: 2006-05-31
  • 公开(公告)号: EP1729378A1
    公开(公告)日: 2006-12-06
  • 发明人: Sato, TakanoriMurakami, TakafumiEgawa, Akira
  • 申请人: FANUC LTD
  • 申请人地址: 3580, Shibokusa Aza-Komanba, Oshino-mura Minamitsuru-gun, Yamanashi 401-0597 JP
  • 专利权人: FANUC LTD
  • 当前专利权人: FANUC LTD
  • 当前专利权人地址: 3580, Shibokusa Aza-Komanba, Oshino-mura Minamitsuru-gun, Yamanashi 401-0597 JP
  • 代理机构: Thum, Bernhard
  • 优先权: JP2005163122 20050602
  • 主分类号: H01S3/036
  • IPC分类号: H01S3/036
Gas laser apparatus
摘要:
A gas laser apparatus including a laser oscillating section including a medium circuit allowing a medium gas to flow therethrough under pressure, and a gas-composition adjusting section for adjusting the composition of the medium gas flowing through the medium circuit of the laser oscillating section. The gas-composition adjusting section comprising a gas supply section for supplying several types of medium gases having different compositions to the medium circuit of the laser oscillating section with a flow rate of each of the medium gases being adjustable; a gas exhaust section for exhausting the medium gas from the medium circuit of the laser oscillating section; and a control section for controlling the gas supply section and the gas exhaust section, to adjust the composition of the medium gas flowing through the medium circuit, in accordance with an oscillation condition including at least one of an attribute of an object matter acted on by a laser beam oscillated by the laser oscillating section and the accuracy of action of the laser beam.
信息查询
0/0