公开(公告)号：EP1729378A1

公开(公告)日：2006-12-06

申请号：EP06011236.4

申请日：2006-05-31

申请人： FANUC LTD

发明人： Sato, Takanori ,  Murakami, Takafumi ,  Egawa, Akira

IPC分类号： H01S3/036

CPC分类号： H01S3/036 ,  H01S3/104 ,  H01S3/2232

摘要： A gas laser apparatus including a laser oscillating section including a medium circuit allowing a medium gas to flow therethrough under pressure, and a gas-composition adjusting section for adjusting the composition of the medium gas flowing through the medium circuit of the laser oscillating section. The gas-composition adjusting section comprising a gas supply section for supplying several types of medium gases having different compositions to the medium circuit of the laser oscillating section with a flow rate of each of the medium gases being adjustable; a gas exhaust section for exhausting the medium gas from the medium circuit of the laser oscillating section; and a control section for controlling the gas supply section and the gas exhaust section, to adjust the composition of the medium gas flowing through the medium circuit, in accordance with an oscillation condition including at least one of an attribute of an object matter acted on by a laser beam oscillated by the laser oscillating section and the accuracy of action of the laser beam.

摘要翻译： 一种包括激光振荡部分的气体激光装置，该激光振荡部分包括允许介质气体在压力下流过其中的介质回路;以及气体组成调节部分，用于调节流过激光振荡部分的介质回路的介质气体的组成。 该气体组成调节部分包括一个气体供应部分，用于将每种介质气体的流量可调节地供应到具有不同组成的几种类型的介质气体到激光振荡部分的介质回路; 用于从所述激光振荡部的介质电路排出所述介质气体的排气部; 以及控制部分，用于控制气体供应部分和排气部分，以根据包括以下操作的物体的属性中的至少一个的振荡条件来调节流经介质回路的介质气体的组成： 由激光振荡部分振荡的激光束和激光束的作用精度。