发明公开
EP1746722A3 Film bulk acoustic wave resonator and manufacturing method thereof 审中-公开
薄膜体声波谐振器(FBAR)及其制造方法

Film bulk acoustic wave resonator and manufacturing method thereof
摘要:
A film bulk acoustic resonator includes a substrate (101); a lower electrode (110) formed on top of the substrate (101); a piezoelectric membrane (113) formed on top of the lower electrode (110) and having a crystallographic axis (CC) so inclined as to generate a total reflection when an acoustic wave advances toward the lower electrode (110); and an upper electrode (115) formed on top of the piezoelectric membrane (113). The circumference of the piezoelectric membrane (113) may comprise an enveloping wall (117) which may be patterned on the same layer as that of forming the upper electrode (115).
信息查询
0/0