发明授权
- 专利标题: CATADIOPTRIC PROJECTION OBJECTIVE WITH INTERMEDIATE IMAGES
- 专利标题(中): 使用图像之间的反射折射投影物镜
-
申请号: EP05738376.2申请日: 2005-05-13
-
公开(公告)号: EP1751601B1公开(公告)日: 2007-12-05
- 发明人: DODOC, Aurelian , ULRICH, Wilhelm , EPPLE, Alexander
- 申请人: Carl Zeiss SMT AG
- 申请人地址: Rudolf-Eber-Strasse 2 73447 Oberkochen DE
- 专利权人: Carl Zeiss SMT AG
- 当前专利权人: Carl Zeiss SMT AG
- 当前专利权人地址: Rudolf-Eber-Strasse 2 73447 Oberkochen DE
- 代理机构: Patentanwälte Ruff, Wilhelm, Beier, Dauster & Partner
- 优先权: US571533P 20040517
- 国际公布: WO2005111689 20051124
- 主分类号: G02B17/08
- IPC分类号: G02B17/08 ; G03F7/20
摘要:
A catadioptric projection objective for imaging of a pattern, which is arranged on the object plane of the projection objective, on the image plane of the projection objective has a first objective part for imaging of an object field to form a first real intermediate image, a second objective part for production of a second real intermediate image using the radiation coming from the first objective part; and a third objective part for imaging of the second real intermediate image on the image plane. The second objective part is a catadioptric objective part with a concave mirror. A first folding mirror for deflection of the radiation coming from the object plane in the direction of the concave mirror and a second folding mirror for deflection of the radiation coming from the concave mirror in the direction of the image plane are provided. A field lens with a positive refractive power is arranged between the first intermediate image and/or the first folding mirror and the concave mirror, in an area close to the field of the first intermediate image.
公开/授权文献
- EP1751601A2 CATADIOPTRIC PROJECTION OBJECTIVE WITH INTERMEDIATE IMAGES 公开/授权日:2007-02-14
信息查询
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B17/00 | 有或无折射元件的具有反射面的系统 |
G02B17/08 | .折反射系统 |