发明公开
EP1770032A1 LEVITATION TRANSPORTATION DEVICE AND LEVITATION TRANSPORTATION METHOD
审中-公开
SCHWEBETRANSPORTVORRICHTUNG UND SCHWEBETSPORTVERFAHREN
- 专利标题: LEVITATION TRANSPORTATION DEVICE AND LEVITATION TRANSPORTATION METHOD
- 专利标题(中): SCHWEBETRANSPORTVORRICHTUNG UND SCHWEBETSPORTVERFAHREN
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申请号: EP05753450.5申请日: 2005-06-22
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公开(公告)号: EP1770032A1公开(公告)日: 2007-04-04
- 发明人: TODA, Masayuki , UMEDA, Masaru, KABUSHIKI KAISHA WATANABE SHOKO
- 申请人: KABUSHIKI KAISHA WATANABE SHOKO , Toda, Masayuki
- 申请人地址: 2-16, Nihonbashi Muromachi 4-chome Chuo-ku, Tokyo 103-0022 JP
- 专利权人: KABUSHIKI KAISHA WATANABE SHOKO,Toda, Masayuki
- 当前专利权人: KABUSHIKI KAISHA WATANABE SHOKO,Toda, Masayuki
- 当前专利权人地址: 2-16, Nihonbashi Muromachi 4-chome Chuo-ku, Tokyo 103-0022 JP
- 代理机构: Weitzel, Wolfgang
- 优先权: JP2004189444 20040628
- 国际公布: WO2006001294 20060105
- 主分类号: B65G51/03
- IPC分类号: B65G51/03 ; B65G47/28 ; B65G49/07 ; H01L21/68
摘要:
A levitation transportation device capable of adjustment when an object being transported is displaced from the center of a transportation path, A levitation transportation device having a transportation path forming a transportation router for an object to be transported, a plurality of jetting nozzles for transporting the object in a levitated manner along the transportation path, one or more detection sections for detecting the direction of the transportation of the object being transported in the transportation path and a control section for independently controlling the plurality of jetting nozzles based on a detection result by the detection sections.
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