发明公开
EP1777492A2 Methods and apparatus for generating a mask for inspecting an object using structured light
审中-公开
用于产生掩模使用结构光来检查物体的方法和装置
- 专利标题： Methods and apparatus for generating a mask for inspecting an object using structured light
- 专利标题（中）： 用于产生掩模使用结构光来检查物体的方法和装置
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申请号： EP06255447.2申请日： 2006-10-23
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公开(公告)号： EP1777492A2公开(公告)日： 2007-04-25
- 发明人: Harding, Kevin George , Qian, Xiaoping , Demuth, Russel Stephen
- 申请人： General Electric Company
- 申请人地址： One River Road Schenectady, NY 12345 US
- 专利权人： General Electric Company
- 当前专利权人： General Electric Company
- 当前专利权人地址： One River Road Schenectady, NY 12345 US
- 代理机构： Illingworth-Law, William Illingworth
- 优先权： US256885 20051024
- 主分类号： G01B11/25
- IPC分类号： G01B11/25
摘要：
A method (100) and apparatus for generating a mask (52) for use with a light measurement system (10) that includes a light source (22) for projecting light onto a surface of an object (12), and an imaging system for receiving light reflected from the surface of the object. A profile of the object to be inspected is determined and a mask based on the determined profile is generated, wherein the mask includes an opening (172) extending therethrough that has a profile that substantially matches a profile of the object as viewed from the light source.
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