发明公开
- 专利标题: BUMP FORMING METHOD AND SOLDER BUMP
- 专利标题(中): 花椰菜
-
申请号: EP05776918.4申请日: 2005-08-30
-
公开(公告)号: EP1796155A1公开(公告)日: 2007-06-13
- 发明人: KARASHIMA, Seiji c/o MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD., , YAMASHITA, Yoshihisa c/o MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD., , TOMEKAWA, Satoru c/o MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD., , KITAE, Takashi c/o MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD., , NAKATANI, Seiichi c/o MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.,
- 申请人: Matsusita Electric Industrial Co., Ltd.
- 申请人地址: 1006 Oaza Kadoma Kadoma-shi, Osaka 571-8501 JP
- 专利权人: Matsusita Electric Industrial Co., Ltd.
- 当前专利权人: Matsusita Electric Industrial Co., Ltd.
- 当前专利权人地址: 1006 Oaza Kadoma Kadoma-shi, Osaka 571-8501 JP
- 代理机构: Eisenführ, Speiser & Partner
- 优先权: JP2004257206 20040903; JP2005091336 20050328
- 国际公布: WO2006025387 20060309
- 主分类号: H01L21/60
- IPC分类号: H01L21/60
摘要:
There is provided a process for forming bumps wherein a plurality of fine bumps are uniformly formed with high productivity. In this process, a resin (13) comprising solder powder and a convection additive (12) is supplied onto a substrate (10) having a plurality of electrodes (11) thereon. And subsequently the substrate (10) is heated to a temperature that enables the solder powder to melt while keeping a flat plate (14) in contact with a surface of the supplied resin (13). During this heating step, the molten solder powder is allowed to self-assemble onto the electrodes (11) so that a plurality of solder balls resulting from the grown molten solder powder are concurrently formed on the electrodes (11) in self-alignment manner. Finally, by moving the flat plate (14) away from the surface of the supplied resin (13), followed by removing such resin (13), there is provided the substrate (10) wherein the bumps (16) are formed on the plurality of the electrodes.
信息查询
IPC分类: