发明公开
EP1850386A1 Electro-optical device, electronic apparatus, and method of manufacturing electro-optical device
审中-公开
一种电光装置,电子装置和方法,用于制造电光装置
- 专利标题: Electro-optical device, electronic apparatus, and method of manufacturing electro-optical device
- 专利标题(中): 一种电光装置,电子装置和方法,用于制造电光装置
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申请号: EP07251523.2申请日: 2007-04-05
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公开(公告)号: EP1850386A1公开(公告)日: 2007-10-31
- 发明人: Sato, Takasi c/o Epson Imaging Devices Corporation , Morita, Satoshi c/o Epson Imaging Devices Corp.
- 申请人: Epson Imaging Devices Corporation
- 申请人地址: 6925, Toyoshina Tazawa Azumino-shi Nagano 399-8285 JP
- 专利权人: Epson Imaging Devices Corporation
- 当前专利权人: Epson Imaging Devices Corporation
- 当前专利权人地址: 6925, Toyoshina Tazawa Azumino-shi Nagano 399-8285 JP
- 代理机构: Cloughley, Peter Andrew
- 优先权: JP2006121641 20060426
- 主分类号: H01L27/12
- IPC分类号: H01L27/12 ; H01L21/77 ; G02F1/1362 ; H01L29/49 ; H01L29/786
摘要:
An electro-optical device includes a thin-film transistor that has a gate electrode, a gate insulating layer, and a semiconductor layer laminated in each of a plurality of pixel regions on an element substrate, a pixel electrode that is electrically connected to a drain region of the thin-film transistor, and a storage capacitor that has a lower electrode and an upper electrode facing each other with the gate insulating layer interposed therebetween. In the thin-film transistor, the gate electrode, the gate insulating layer, and the semiconductor layer are laminated sequentially in that order. The gate insulating layer includes a lower gate insulating layer having one or a plurality of insulating films, and an upper gate insulating layer having one or a plurality of insulating films. The lower gate insulating layer is formed to have a thickness sufficient to reduce parasitic capacitance of the thin-film transistor, and a portion of the lower gate insulating layer where the lower electrode and the upper electrode overlap each other is removed.
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