发明公开
- 专利标题: APPARATUS AND PROCESS FOR CRYSTAL GROWTH
- 专利标题(中): 用于晶体生长的装置和方法
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申请号: EP06709605.7申请日: 2006-02-02
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公开(公告)号: EP1851368A1公开(公告)日: 2007-11-07
- 发明人: BASU, Arnab , ROBINSON, Max 1 Bishop's Court Low Road , CANTWELL, Ben 152 Highfield Rise , BRINKMAN, Andy
- 申请人: Durham Scientific Crystals Ltd
- 申请人地址: Netpark Incubator, Thomas Wright Way Sedgefield, County Durham TS21 3FD GB
- 专利权人: Durham Scientific Crystals Ltd
- 当前专利权人: Durham Scientific Crystals Ltd
- 当前专利权人地址: Netpark Incubator, Thomas Wright Way Sedgefield, County Durham TS21 3FD GB
- 代理机构: Howe, Steven
- 优先权: GB0503634 20050222
- 国际公布: WO2006090104 20060831
- 主分类号: C30B23/00
- IPC分类号: C30B23/00 ; C30B29/48
摘要:
The present invention relates to an apparatus for vapour phase crystal growth to produce multiple single crystals in one growth cycle comprising one central source chamber, a plurality of growth chambers, a plurality of passage means adapted for transport of vapour from the source chamber to the growth chambers, wherein the source chamber is thermally decoupled from the growth chambers.
公开/授权文献
- EP1851368B1 APPARATUS AND PROCESS FOR CRYSTAL GROWTH 公开/授权日:2012-08-08
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