发明公开
EP1872387A4 METHOD AND SYSTEM FOR FABRICATING SEMICONDUCTOR COMPONENTS WITH THROUGH WIRE INTERCONNECTS 有权
VERFAHREN UND系统ZUR HERSTELLUNG VON HALBLEITERBAUELEMENTEN MIT DURCHLEITUNGSVERBINDUNGEN

  • 专利标题: METHOD AND SYSTEM FOR FABRICATING SEMICONDUCTOR COMPONENTS WITH THROUGH WIRE INTERCONNECTS
  • 专利标题(中): VERFAHREN UND系统ZUR HERSTELLUNG VON HALBLEITERBAUELEMENTEN MIT DURCHLEITUNGSVERBINDUNGEN
  • 申请号: EP06739005
    申请日: 2006-03-20
  • 公开(公告)号: EP1872387A4
    公开(公告)日: 2010-08-25
  • 发明人: HEMBREE DAVID R
  • 申请人: MICRON TECHNOLOGY INC
  • 专利权人: MICRON TECHNOLOGY INC
  • 当前专利权人: MICRON TECHNOLOGY INC
  • 优先权: US10240805 2005-04-08
  • 主分类号: H01L23/49
  • IPC分类号: H01L23/49
METHOD AND SYSTEM FOR FABRICATING SEMICONDUCTOR COMPONENTS WITH THROUGH WIRE INTERCONNECTS
摘要:
A method for fabricating a semiconductor component with a through wire interconnect includes the step of providing a substrate having a circuit side, a back side, and a through via. The method also includes the steps of: threading a wire through the via, forming a contact on the wire on the back side, forming a bonded contact on the wire on the circuit side, and then severing the wire from the bonded contact. The through wire interconnect includes the wire in the via, the contact on the back side and the bonded contact on the circuit side. The contact on the back side, and the bonded contact on the circuit side, permit multiple components to be stacked with electrical connections between adjacent components. A system for performing the method includes the substrate with the via, and a wire bonder having a bonding capillary configured to thread the wire through the via, and form the contact and the bonded contact. The semiconductor component can be used to form chip scale components, wafer scale components, stacked components, or interconnect components for electrically engaging or testing other semiconductor components.
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