发明授权
- 专利标题: METHOD OF GROWING SILICON SINGLE CRYSTAL
- 专利标题(中): 用于生产硅
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申请号: EP05811258.2申请日: 2005-12-01
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公开(公告)号: EP1897977B1公开(公告)日: 2015-01-21
- 发明人: INAMI, Shuichi c/o SUMCO CORPORATION , TAKASE, Nobumitsu c/o SUMCO CORPORATION , KOGURE, Yasuhiro c/o SUMCO CORPORATION , HAMADA, Ken c/o SUMCO CORPORATION , NAKAMURA, Tsuyoshi c/o SUMCO CORPORATION
- 申请人: SUMCO Corporation
- 申请人地址: 2-1, Shibaura 1-chome, Minato-ku Tokyo 105-8634 JP
- 专利权人: SUMCO Corporation
- 当前专利权人: SUMCO Corporation
- 当前专利权人地址: 2-1, Shibaura 1-chome, Minato-ku Tokyo 105-8634 JP
- 代理机构: Bertsch, Florian Oliver
- 优先权: JP2005179995 20050620
- 国际公布: WO2006137179 20061228
- 主分类号: C30B29/06
- IPC分类号: C30B29/06 ; C30B15/00 ; C30B15/04 ; C30B15/14
公开/授权文献
- EP1897977A1 METHOD OF GROWING SILICON SINGLE CRYSTAL 公开/授权日:2008-03-12
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