发明公开
EP1901154A1 VARIABLE FLOW RANGE TYPE FLOW CONTROL DEVICE
审中-公开
DURCHFLUSSREGLER MIT VARIABLEM FLUSSBEREICH
- 专利标题： VARIABLE FLOW RANGE TYPE FLOW CONTROL DEVICE
- 专利标题（中）： DURCHFLUSSREGLER MIT VARIABLEM FLUSSBEREICH
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申请号： EP06767569.4申请日： 2006-06-22
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公开(公告)号： EP1901154A1公开(公告)日： 2008-03-19
- 发明人: OHMI, Tadahiro , SAITO, Masahito , HINO, Shoichi , SHIMAZU, Tsuyoshi, c/o Tokyo Electron AT Ltd. , MIURA, Kazuyuki, c/o Tokyo Electron AT Ltd. , NISHINO, Kouji, c/o Fujikin Incorporated , NAGASE, Masaaki, c/o Fujikin Incorporated , SUGITA, Katsuyuki, c/o Fujikin Incorporated , HIRATA, Kaoru, c/o Fujikin Incorporated , DOHI, Ryousuke, c/o Fujikin Incorporated , HIROSE, Takashi, c/o Fujikin Incorporated , SHINOHARA, Tsutomu, c/o Fujikin Incorporated , IKEDA, Nobukazu, c/o Fujikin Incorporated , IMAI, Tomokazu, c/o Fujikin Incorporated , YOSHIDA, Toshihide, c/o Fujikin Incorporated , TANAKA, Hisashi, c/o Fujikin Incorporated
- 申请人： FUJIKIN INCORPORATED , National University Corporation Tohoku Unversity , TOKYO ELECTRON LIMITED
- 申请人地址： 3-2, Itachibori 2-chome, Nishi-ku Osaka-shi, Osaka-fu 550-0012 JP
- 专利权人： FUJIKIN INCORPORATED,National University Corporation Tohoku Unversity,TOKYO ELECTRON LIMITED
- 当前专利权人： FUJIKIN INCORPORATED,National University Corporation Tohoku Unversity,TOKYO ELECTRON LIMITED
- 当前专利权人地址： 3-2, Itachibori 2-chome, Nishi-ku Osaka-shi, Osaka-fu 550-0012 JP
- 代理机构： Neilson, Martin Mark
- 优先权： JP2005185845 20050627
- 国际公布： WO2007001041 20070104
- 主分类号： G05D7/00
- IPC分类号： G05D7/00 ; G01F1/00 ; G01F1/42 ; G01F7/00
摘要：
It is so made that a flow rate control apparatus can be downsized and its installation costs can be reduced by achieving accurate flow rate control of a fluid over a wider flow quantity range with one set of flow rate control apparatus.
Specifically, with a pressure type flow rate control apparatus wherein a flow rate of a fluid passing through an orifice 8 is computed as Qc=KP 1 (where K is a proportionality constant), or as Qc=KP 2 m (P 1 - P 2 ) n (where K is a proportionality constant, m and n constants), by using an orifice upstream side pressure P 1 and/or an orifice downstream side pressure P 2 , a fluid passage between the downstream side of a control valve and a fluid supply pipe of said pressure type flow rate control apparatus are made to be more than at least 2 fluid passages in parallel, wherein orifices having different flow rate characteristics are provided with the afore-mentioned fluid passages arranged in parallel, the afore-mentioned fluid in a small floe quantity range is made to flow to one orifice for the flow control of the fluid in the small flow quantity range, while the afore-mentioned fluid in a large flow quantity range is made to flow to the other orifice for the flow control of the fluid in the large flow quantity range.
Specifically, with a pressure type flow rate control apparatus wherein a flow rate of a fluid passing through an orifice 8 is computed as Qc=KP 1 (where K is a proportionality constant), or as Qc=KP 2 m (P 1 - P 2 ) n (where K is a proportionality constant, m and n constants), by using an orifice upstream side pressure P 1 and/or an orifice downstream side pressure P 2 , a fluid passage between the downstream side of a control valve and a fluid supply pipe of said pressure type flow rate control apparatus are made to be more than at least 2 fluid passages in parallel, wherein orifices having different flow rate characteristics are provided with the afore-mentioned fluid passages arranged in parallel, the afore-mentioned fluid in a small floe quantity range is made to flow to one orifice for the flow control of the fluid in the small flow quantity range, while the afore-mentioned fluid in a large flow quantity range is made to flow to the other orifice for the flow control of the fluid in the large flow quantity range.
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