发明公开
- 专利标题: MICRO-CAVITY MEMS DEVICE AND METHOD OF FABRICATING SAME
- 专利标题(中): 根据上述制造微腔和工艺的MEMS器件
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申请号: EP06802645.9申请日: 2006-08-30
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公开(公告)号: EP1920493A2公开(公告)日: 2008-05-14
- 发明人: HSU, Louis, C. , CLEVENGER, Lawrence, A. , DALTON, Timothy, J. , RADENS, Carl, J. , WONG, Keith Kwong, Hon , YANG, Chih-chao
- 申请人: International Business Machines Corporation
- 申请人地址: New Orchard Road Armonk, NY 10504 US
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: New Orchard Road Armonk, NY 10504 US
- 代理机构: Williams, Julian David
- 优先权: US217163 20050901
- 国际公布: WO2007027813 20070308
- 主分类号: H01P1/10
- IPC分类号: H01P1/10
摘要:
A MEM switch is described having a free moving element (140) within in micro-cavity (40), and guided by at least one inductive element. The switch consists of an upper inductive coil (170); an optional lower inductive coil (190), each having a metallic core (180,200) preferably made of permalloy; a micro-cavity (40); and a free-moving switching element (140) also made of magnetic material. Switching is achieved by passing a current through the upper coil, inducing a magnetic field in the coil element. The magnetic field attracts the free-moving magnetic element upwards, shorting two open wires (M_I M_r) and thus, closing the switch. When the current flow stops or is reversed, the free-moving magnetic element drops back by gravity to the bottom of the micro-cavity and the wires open. When gravity cannot be used, a lower coil becomes necessary to pull the free-moving switching element back and holding it at its original position.
公开/授权文献
- EP1920493B1 MICRO-CAVITY MEMS DEVICE AND METHOD OF FABRICATING SAME 公开/授权日:2012-12-19
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