发明公开
- 专利标题: SHEAR MEASURING METHOD AND ITS DEVICE
- 专利标题(中): 换档测量方法和装置
-
申请号: EP06810594申请日: 2006-09-27
-
公开(公告)号: EP1942331A4公开(公告)日: 2015-09-02
- 发明人: KURIHARA KAZUE , SAKUMA HIROSHI , MIZUKAMI MASASHI
- 申请人: JAPAN SCIENCE & TECH AGENCY
- 专利权人: JAPAN SCIENCE & TECH AGENCY
- 当前专利权人: JAPAN SCIENCE & TECH AGENCY
- 优先权: JP2005282769 2005-09-28; JP2005282768 2005-09-28
- 主分类号: G01N19/04
- IPC分类号: G01N19/04 ; G01L5/00 ; G01N11/00
摘要:
A resonance shear measuring method capable of simple and rapid measurement by obtaining a resonance shear curve through Fourier transformation of a damping curve of an oscillation on one side surface of a sample during measurement of shear response from the sample is provided. The method is to measure shear response of the sample sandwiched between the solid surfaces of a resonance shear measurement unit along with a change in film thickness by applying an input signal U in to a horizontal driving section of the shear resonance measurement unit, by detecting an oscillation on one side surface of the sample sandwiched between solid surfaces of the resonance shear measurement unit as an output signal U out by means of a displacement gauge, and by applying the output signal U out along with the input signal U in to a resonance shear signal analyzer, wherein a damping curve of the oscillation on one side surface of the sample is Fourier transformed by a Fourier transformation section (5B) to obtain a resonance shear curve. Also provided is a twin-path type apparatus for shear stress measurement capable of precise measurement of shear stress by using a twin-path method by which a distance between opaque substrates can be measured.
信息查询