公开(公告)号：EP1942331A4

公开(公告)日：2015-09-02

申请号：EP06810594

申请日：2006-09-27

申请人： JAPAN SCIENCE & TECH AGENCY

发明人： KURIHARA KAZUE ,  SAKUMA HIROSHI ,  MIZUKAMI MASASHI

IPC分类号： G01N19/04 ,  G01L5/00 ,  G01N11/00

CPC分类号： G01N19/04 ,  G01N2203/0025

摘要： A resonance shear measuring method capable of simple and rapid measurement by obtaining a resonance shear curve through Fourier transformation of a damping curve of an oscillation on one side surface of a sample during measurement of shear response from the sample is provided. The method is to measure shear response of the sample sandwiched between the solid surfaces of a resonance shear measurement unit along with a change in film thickness by applying an input signal U in to a horizontal driving section of the shear resonance measurement unit, by detecting an oscillation on one side surface of the sample sandwiched between solid surfaces of the resonance shear measurement unit as an output signal U out by means of a displacement gauge, and by applying the output signal U out along with the input signal U in to a resonance shear signal analyzer, wherein a damping curve of the oscillation on one side surface of the sample is Fourier transformed by a Fourier transformation section (5B) to obtain a resonance shear curve. Also provided is a twin-path type apparatus for shear stress measurement capable of precise measurement of shear stress by using a twin-path method by which a distance between opaque substrates can be measured.