发明公开
- 专利标题: NOVEL COMPOUND, POLYMER, AND RESIN COMPOSITION
- 专利标题(中): 新的化合物,聚合物和树脂组分
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申请号: EP06834591.7申请日: 2006-12-13
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公开(公告)号: EP1961739A1公开(公告)日: 2008-08-27
- 发明人: NAGAI, Tomoki , EBATA, Takuma , MATSUMURA, Nobuji
- 申请人: JSR Corporation
- 申请人地址: 5-6-10, Tsukiji, Chuo-ku Tokyo 104-8410 JP
- 专利权人: JSR Corporation
- 当前专利权人: JSR Corporation
- 当前专利权人地址: 5-6-10, Tsukiji, Chuo-ku Tokyo 104-8410 JP
- 代理机构: TBK-Patent
- 优先权: JP2005360406 20051214
- 国际公布: WO2007069640 20070621
- 主分类号: C07C381/12
- IPC分类号: C07C381/12 ; C08F220/28 ; G03F7/004 ; G03F7/039 ; H01L21/027
摘要:
A radiation-sensitive resin composition which has high transparency to radiation, excelling in basic properties as a resist such as sensitivity, resolution, and pattern shape, and, in particular, exhibiting high resolution performance, excellent DOF and LER, and high resistance to a liquid medium used in liquid immersion lithography is provided. Also provided are a polymer which can be used in the composition, a novel compound useful for synthesizing the polymer, and a method of producing the composition. A radiation-sensitive resin composition having an excellent resistance to a liquid medium can be obtained by using the novel compound shown by the following formula (1),
wherein R 1 represents a methyl group or a hydrogen atom, R 2 , R 3 and R 4 individually represent a substituted or unsubstituted monovalent organic group having 1 to 10 carbon atoms, n is an integer from 0 to 3, A represents a methylene group, a linear or branched alkylene group having 2 to 10 carbon atoms, or an arylene group, and X - represents a counter ion of S + .
wherein R 1 represents a methyl group or a hydrogen atom, R 2 , R 3 and R 4 individually represent a substituted or unsubstituted monovalent organic group having 1 to 10 carbon atoms, n is an integer from 0 to 3, A represents a methylene group, a linear or branched alkylene group having 2 to 10 carbon atoms, or an arylene group, and X - represents a counter ion of S + .
公开/授权文献
- EP1961739B1 NOVEL COMPOUND, POLYMER, AND RESIN COMPOSITION 公开/授权日:2012-10-17
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