发明公开
EP1996899A1 DREHRATENSENSOR MIT KOPPLUNGSBALKEN 有权
与组合梁的旋转速率传感器

DREHRATENSENSOR MIT KOPPLUNGSBALKEN
摘要:
Rate-of-rotation sensor (1) comprising at least one substrate (2), wherein the basic surface of the substrate (2) is oriented parallel to the x-y plane of a cartesian coordinate system, at least two base elements (9,10) each having a frame (7,8), a means for suspending the frame from the substrate, at least one seismic mass (3,4,5,6) and a means (41,42) for suspending the seismic mass from the frame (7,8), having one or more drive means for driving one or more base elements and one or more reading devices (16), wherein the at least two base elements (9,10) are coupled to one another by means of at least one coupling bar (11,12,13,14).
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