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公开(公告)号：EP1606583A2
公开(公告)日：2005-12-21
申请号：EP04716934.7
申请日：2004-03-03
IPC分类号： G01C19/56
CPC分类号： G01C19/5719 , Y10T74/1275
摘要： Micromachined vibratory gyroscope having two or more coplanar movable masses suspended over a planar substrate. Two perpendicular axes (x and y) are defined within the substrate plane, while a third, the z-axis or input axis, is defined to be perpendicular to the substrate plane. The movements of the two masses along the x-axis are coupled through an electrostatic coupling means so that the natural resonant frequency of the in-phase mode and that of the anti-phase mode are separated from each other for the resonances along the x-axis. When the two masses are driven to vibrate along the x-axis in the anti-phase mode and the device experiences rotation about the z-axis, Coriolis forces act differentially on the masses in the Ydirection, causing the two masses to dither in an anti-phase motion along the y-axis. The anti-phase dithering along the y-axis can be sensed directly by a rate sensor to measure the rate of rotation about the z-axis. Alternatively, the anti-phase dithering of the first and second bodies along the y-axis can be transferred to other movable bodies (i.e., rate-sensing masses) whose movement is then sensed to measure the rate of rotation about the z-axis. The sensing bodies are preferably suspended in such manner that, in the absence of Coriolis forces, the x-axis motion of the vibrating masses does not affect the sensing bodies. That inhibits motion of the sensing bodies in response to linear acceleration within the plane of the substrate, but permits those bodies to respond readily to the Corollas-induced motion about an axis perpendicular to the substrate plane.
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公开(公告)号：EP2121509A2
公开(公告)日：2009-11-25
申请号：EP07857609.7
申请日：2007-12-14
IPC分类号： B81B1/00
CPC分类号： H01L23/055 , B81B2207/012 , B81B2207/095 , B81B2207/096 , B81B2207/097 , B81C1/0023 , B81C1/00301 , H01L2224/73204 , H01L2924/01019 , H01L2924/01079 , H01L2924/01322 , H01L2924/1433 , H01L2924/1461 , H01L2924/00
摘要： The invention relates to a method for producing an encapsulation module (A) and/or for encapsulating a micromechanical arrangement, wherein electronic connection means, such as through contacts (2), electrical lines, contacts and/or electronic structures are produced from a blank (1) of electrically conducting semiconductor material, in particular, doped silicon, by means of one or more structuring processes and/or etching processes, wherein in the process of the formation of the electronic connector means, a plinth (6) of the semiconductor material is generated on which the electronic connector means are arranged, subsequently being embedded in an embedding material (9) and the embedding material and/or the semiconductor plinth (6) are removed after the embedding to the extent that a defined number of the electronic connector means have electrical contact on at least one of the outer surfaces (7, 8) of the encapsulation module (A) and during the process of the formation of the electronic connector means with the at least one structuring and/or etching process at least one isolated material mound on each of which a through contact (2) is arranged, are formed on the plinth of the semiconductor material (6), which forms a semiconductor electrode (3). The invention further relates to an encapsulation module and/or a micromechanical arrangement with at least one through contact (2) and at least one semiconductor electrode (3) and the use thereof in motor vehicles.
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公开(公告)号：EP1996899A1
公开(公告)日：2008-12-03
申请号：EP07726810.0
申请日：2007-03-12
IPC分类号： G01C19/56
CPC分类号： G01C19/574 , G01C19/5712 , G01P15/0888 , Y10T29/49124
摘要： Rate-of-rotation sensor (1) comprising at least one substrate (2), wherein the basic surface of the substrate (2) is oriented parallel to the x-y plane of a cartesian coordinate system, at least two base elements (9,10) each having a frame (7,8), a means for suspending the frame from the substrate, at least one seismic mass (3,4,5,6) and a means (41,42) for suspending the seismic mass from the frame (7,8), having one or more drive means for driving one or more base elements and one or more reading devices (16), wherein the at least two base elements (9,10) are coupled to one another by means of at least one coupling bar (11,12,13,14).
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4.发明授权VERFAHREN UND VORRICHTUNG ZUR REGELUNG BZW. STEUERUNG DER FAHRSTABILITÄT EINES FAHRZEUGS 有权控制方法和设备或 控制车辆的行驶稳定性
公开(公告)号：EP2427356B1
公开(公告)日：2017-04-12
申请号：EP10718954.0
申请日：2010-04-29
发明人： HARTMANN, Bernhard , ECKERT, Alfred , FRITZ, Stefan , ROLL, Georg
IPC分类号： B60T8/1755
CPC分类号： B60T8/17558 , B60T8/17551 , B60T2201/022 , B60T2201/122
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公开(公告)号：EP1725880A1
公开(公告)日：2006-11-29
申请号：EP05729516.4
申请日：2005-03-16
CPC分类号： G01P15/0888 , G01P15/18
摘要： The invention relates to a sensor arrangement for detecting movement, said arrangement being embodied as a monolithic arrangement containing a plurality of integrated sensors. A first sensor is used to detect a linear acceleration and a second sensor is used to detect a rate of rotation. The inventive sensor arrangement also comprises a third sensor for detecting an angular acceleration.
摘要翻译： 用于检测运动的传感器装置技术领域本发明涉及一种用于检测运动的传感器装置，所述装置被实施为包含多个集成传感器的单片装置 第一个传感器用于检测线性加速度，第二个传感器用于检测旋转速度。 本发明的传感器装置还包括用于检测角加速度的第三传感器。
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公开(公告)号：EP1996899B1
公开(公告)日：2014-09-17
申请号：EP07726810.0
申请日：2007-03-12
IPC分类号： G01C19/56 , G01C19/5712 , G01C19/574 , G01P15/08
CPC分类号： G01C19/574 , G01C19/5712 , G01P15/0888 , Y10T29/49124
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公开(公告)号：EP1606583B1
公开(公告)日：2012-08-29
申请号：EP04716934.7
申请日：2004-03-03
IPC分类号： G01C19/56
CPC分类号： G01C19/5719 , Y10T74/1275
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8.发明公开VERFAHREN UND VORRICHTUNG ZUR REGELUNG BZW. STEUERUNG DER FAHRSTABILITÄT EINES FAHRZEUGS 有权控制方法和设备或 控制车辆的行驶稳定性
公开(公告)号：EP2427356A1
公开(公告)日：2012-03-14
申请号：EP10718954.0
申请日：2010-04-29
发明人： HARTMANN, Bernhard , ECKERT, Alfred , FRITZ, Stefan , ROLL, Georg
IPC分类号： B60T8/1755
CPC分类号： B60T8/17558 , B60T8/17551 , B60T2201/022 , B60T2201/122
摘要： The invention relates to a method and apparatus for regulating or controlling the driving stability of a vehicle and for avoiding collisions with an object which is located in the traffic lane. The invention further relates to a driving stability regulator. The method according to the invention for regulating or controlling the driving stability of a vehicle and for avoiding collisions with an object that is located in the traffic lane comprises the following steps: determining based on environmental signals whether a critical situation in terms of driving dynamics, in particular an imminent collision, exists, calculating an evasive path if a critical situation in terms of driving dynamics exists, determining based on several input variables the pressures for individual brakes of the vehicle, and activating preparatory measures of the driving dynamics regulator, in particular dynamic switching of control parameters if the critical situation in terms of driving dynamics exists. The apparatus and the driving stability regulator are suitable for implementing the method.
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