发明公开
- 专利标题： Coating compositions
- 专利标题（中）： 涂料组合物
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申请号： EP08154133.6申请日： 2008-04-07
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公开(公告)号： EP1998222A2公开(公告)日： 2008-12-03
- 发明人: Gallagher, Michael K , Zampini, Anthony
- 申请人： Rohm and Haas Electronic Materials LLC
- 申请人地址： 455 Forest Street Marlborough, MA 01752 US
- 专利权人： Rohm and Haas Electronic Materials LLC
- 当前专利权人： Rohm and Haas Electronic Materials LLC
- 当前专利权人地址： 455 Forest Street Marlborough, MA 01752 US
- 代理机构： Buckley, Guy Julian
- 优先权： US922259P 20070406
- 主分类号： G03F7/09
- IPC分类号： G03F7/09
摘要：
The invention relates to organic coating compositions useful for photolithographic processes including the manufacture of semiconductors and other electronic devices. Compositions of the invention comprise component that comprise a nitrile-containing component, such as a resin component that contains nitrile moieties. Compositions of the invention are particularly useful as an underlayer material in two, three, four or more layer pattern forming processes.
公开/授权文献
- EP1998222B1 Coating compositions 公开/授权日：2013-03-20
信息查询
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