- 专利标题： MEMS DEVICE AND METHOD OF FABRICATING THE SAME
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申请号： EP07777193.9申请日： 2007-05-21
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公开(公告)号： EP2035327B1公开(公告)日： 2018-09-26
- 发明人: GOODELLE, Jason, P. , GABRIEL, Kaigham, J.
- 申请人： Akustica Inc.
- 申请人地址： 2835 East Carson Street, Suite 301 Pittsburgh, PA 15203 US
- 专利权人： Akustica Inc.
- 当前专利权人： Akustica Inc.
- 当前专利权人地址： 2835 East Carson Street, Suite 301 Pittsburgh, PA 15203 US
- 代理机构： DREISS Patentanwälte PartG mbB
- 优先权： US446398 20060605
- 国际公布： WO2007145778 20071221
- 主分类号： B81C1/00
- IPC分类号： B81C1/00 ; H04R31/00
摘要：
A MEMS device includes a chip carrier having an acoustic port extending from a first surface to a second surface of the chip carrier, a MEMS die disposed on the chip carrier to cover the acoustic port at the first surface of the chip carrier, and an enclosure bonded to the chip carrier and encapsulating the MEMS die.
公开/授权文献
- EP2035327A2 MEMS DEVICE AND METHOD OF FABRICATING THE SAME 公开/授权日：2009-03-18
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