发明公开
- 专利标题: ASSEMBLY OF NANOSCALED FIELD EFFECT TRANSISTORS
- 专利标题(中): 安排纳米级场效应晶体管
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申请号: EP07820358.5申请日: 2007-09-19
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公开(公告)号: EP2064744A2公开(公告)日: 2009-06-03
- 发明人: WERNERSSON, Lars-Erik , LIND, Erik , BRYLLERT, Tomas , OHLSSON, Jonas , LÖWGREN, Truls , SAMUELSON, Lars , THELANDER, Claes
- 申请人: QuNano AB
- 申请人地址: Ideon Science Park Scheelevägen 17 223 70 Lund SE
- 专利权人: QuNano AB
- 当前专利权人: QuNano AB
- 当前专利权人地址: Ideon Science Park Scheelevägen 17 223 70 Lund SE
- 代理机构: Franks, Barry Gerard
- 优先权: SE0601998 20060919; SE0701884 20070817
- 国际公布: WO2008034850 20080327
- 主分类号: H01L29/06
- IPC分类号: H01L29/06 ; H01L27/088
摘要:
The present invention relates to vertical nanowire transistors with a wrap-gated geometry. The threshold voltage of the vertical nanowire transistors is controlled by the diameter of the nanowire, the doping of the nanowire, the introduction of segments of heterostructures in the nanowire, the doping in shell-structures surrounding the nanowire, tailoring the work function of the gate stack, by strain engineering, by control of the dielectrica or the choice of nanowire material. Transistors with varying threshold voltages are provided on the same substrate, which enables the design of advanced circuits utilizing the shifts in the threshold voltages, similar to the directly coupled field logic.
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