发明授权
EP2134886B1 VERFAHREN ZUR HERSTELLUNG VON FLÄCHIGEN GRÖSSEN- ODER ABSTANDSVARIATIONEN IN MUSTERN VON NANOSTRUKTUREN AUF OBERFLÄCHEN
有权
过程:用于产生表面尺寸和距离的变化在结构中在表面上的纳米图案
- 专利标题: VERFAHREN ZUR HERSTELLUNG VON FLÄCHIGEN GRÖSSEN- ODER ABSTANDSVARIATIONEN IN MUSTERN VON NANOSTRUKTUREN AUF OBERFLÄCHEN
- 专利标题(英): Method for the creation of planar variations in size or distance in nanostructure patterns on surfaces
- 专利标题(中): 过程:用于产生表面尺寸和距离的变化在结构中在表面上的纳米图案
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申请号: EP08716484.4申请日: 2008-03-12
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公开(公告)号: EP2134886B1公开(公告)日: 2011-03-02
- 发明人: SPATZ, Joachim , LOHMÜLLER, Theobald , ARNOLD, Marco
- 申请人: Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V.
- 申请人地址: Hofgartenstraße 8 80539 München DE
- 专利权人: Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V.
- 当前专利权人: Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V.
- 当前专利权人地址: Hofgartenstraße 8 80539 München DE
- 代理机构: Katzameyer, Michael
- 优先权: DE102007017032 20070411
- 国际公布: WO2008125172 20081023
- 主分类号: C23C18/08
- IPC分类号: C23C18/08 ; C23C18/12 ; C23C18/14 ; G02B1/12 ; G02B3/00
摘要:
The invention relates to a method for creating planar variations in size or distance in nanostructure patterns on surfaces. More particularly, in a preferred embodiment, the disclosed method comprises the following steps: a) a substrate is brought in contact with a liquid phase containing micelles of an organic two-block or multiblock copolymer which are loaded with an inorganic metal compound, by immersing the substrate into said liquid phase, a process during which chemically different polymer domains comprising inorganic metal compounds that are trapped in micelles are deposited on the substrate; b) the substrate is withdrawn from the liquid phase at a predetermined withdrawing speed that is continuously or gradually varied such that a gradient of the lateral separation length of the polymer domains is created on the substrate surface; and c) the inorganic metal compounds in the deposited polymer domains are transformed into inorganic nanoparticles by means of an oxidation or reduction treatment, and all or part of the organic polymer is optionally removed using a plasma treatment. The positions and the lateral separation length of the obtained nanoparticles are determined by the positions and the lateral separation length of the deposited polymer domains.
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