发明公开
EP2135305A2 SYSTÈME DE POSITIONNEMENT FIN PAR MOTEUR INERTIEL À BASE D'AMPLIFICATEUR MÉCANIQUE 有权
惯性MOTOR FINE TUNING系统上的机械放大器的BASIS

  • 专利标题: SYSTÈME DE POSITIONNEMENT FIN PAR MOTEUR INERTIEL À BASE D'AMPLIFICATEUR MÉCANIQUE
  • 专利标题(英): Fine positioning system using an inertial motor based on a mechanical amplifier
  • 专利标题(中): 惯性MOTOR FINE TUNING系统上的机械放大器的BASIS
  • 申请号: EP08787781.7
    申请日: 2008-03-12
  • 公开(公告)号: EP2135305A2
    公开(公告)日: 2009-12-23
  • 发明人: CLAEYSSEN, FrankBARILLOT, François
  • 申请人: Cedrat Technologies
  • 申请人地址: Zirst Grenoble - Meylan 38240 Meylan FR
  • 专利权人: Cedrat Technologies
  • 当前专利权人: Cedrat Technologies
  • 当前专利权人地址: Zirst Grenoble - Meylan 38240 Meylan FR
  • 代理机构: Hecké, Gérard
  • 优先权: FR0701822 20070314
  • 国际公布: WO2008132337 20081106
  • 主分类号: H01L41/09
  • IPC分类号: H01L41/09
SYSTÈME DE POSITIONNEMENT FIN PAR MOTEUR INERTIEL À BASE D'AMPLIFICATEUR MÉCANIQUE
摘要:
The invention relates to a fine positioning system using an inertial motor based on a mechanical amplifier, that comprises a first amplified inertial sub-assembly (20) including a mechanical amplifier (1), a piezo-active member (2) and a counter-mass (3). A second relative drive sub-assembly (21) includes a clamp (15) and a clamped member (24) attached to the first amplified inertial sub-assembly (20). Asymmetric excitation cycles of the first inertial sub-assembly generate impact forces and movements amplified in a driving direction (z), thus resulting in sliding and adhesion successions of the clamped member in the clamp in order to generate a relative translation movement of the points A and B relative to the point D. The mechanical amplifier (1) increases the step size and reduces the supply inrush currents. Fine and dynamic positioning of the point B relative to the point D can be achieved with augmented strokes using the amplifier (1).
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