Invention Publication
EP2198254A1 PROCÉDÉ ET DISPOSITIF DE CARACTÉRISATION D'ÉLÉMENTS MICROSCOPIQUES
有权
VERFAHREN UND VORRICHTUNG ZUR KENNZEICHNUNG MIKROSKOPISCHER ELEMENTE
- Patent Title: PROCÉDÉ ET DISPOSITIF DE CARACTÉRISATION D'ÉLÉMENTS MICROSCOPIQUES
- Patent Title (English): Method and device for characterizing microscopic elements
- Patent Title (中): VERFAHREN UND VORRICHTUNG ZUR KENNZEICHNUNG MIKROSKOPISCHER ELEMENTE
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Application No.: EP08869283.5Application Date: 2008-10-10
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Publication No.: EP2198254A1Publication Date: 2010-06-23
- Inventor: BOUYGE, David , LESVIGNE-BUY, Christelle , COUDERC, Vincent , CRUNTEANU STANESCU, Aurélian , LEPROUX, Philippe , LEFORT, Laurent
- Applicant: Centre National de la Recherche Scientifique- CNRS , Université de Limoges
- Applicant Address: 3, rue Michel-Ange 75794 Paris Cedex 16 FR
- Assignee: Centre National de la Recherche Scientifique- CNRS,Université de Limoges
- Current Assignee: Centre National de la Recherche Scientifique- CNRS,Université de Limoges
- Current Assignee Address: 3, rue Michel-Ange 75794 Paris Cedex 16 FR
- Agency: Novagraaf Technologies
- Priority: FR0707098 20071010
- International Announcement: WO2009087287 20090716
- Main IPC: G01J3/44
- IPC: G01J3/44 ; G01N21/64 ; G01N15/14
Abstract:
The object of the invention is to provide a method and a device for characterizing microscopic elements, which is both reliable and inexpensive and which gives good results when there is a large number of elements to be characterized. For this purpose, the invention proposes chopping the source signal (12, 120) by means of MOEMS microsystems (200) based on optoelectromechanical elements (220), thereby generating novel options for the modulation, especially temporal modulation, of excitation signals. More precisely, one subject of the invention is a method of characterizing microscopic elements consisting in particular in propagating a dispersed lamp source signal (12, 120), in spatially chopping the spectrum of the source signal (12, 120) into at least two excitation signals (18, 180) having predetermined wavelengths λi, in encoding the excitation signals (18, 180), in focusing the excitation signals (18, 180), so as to generate a probe signal (28, 280) propagated towards a measurement zone (30, 300), and in analyzing an interaction signal (32, 320) deriving from the interaction of the probe signal (28, 280) with the microscopic elements that are located in the measurement space (30, 300). The spatial chopping of the light source signal spectrum is carried out by a MOEMS microsystem (200) based on optoelectromechanical elements (220).
Public/Granted literature
- EP2198254B1 PROCÉDÉ ET DISPOSITIF DE CARACTÉRISATION D'ÉLÉMENTS MICROSCOPIQUES Public/Granted day:2017-03-08
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