发明公开
EP2198254A1 PROCÉDÉ ET DISPOSITIF DE CARACTÉRISATION D'ÉLÉMENTS MICROSCOPIQUES
有权
VERFAHREN UND VORRICHTUNG ZUR KENNZEICHNUNG MIKROSKOPISCHER ELEMENTE
- 专利标题: PROCÉDÉ ET DISPOSITIF DE CARACTÉRISATION D'ÉLÉMENTS MICROSCOPIQUES
- 专利标题(英): Method and device for characterizing microscopic elements
- 专利标题(中): VERFAHREN UND VORRICHTUNG ZUR KENNZEICHNUNG MIKROSKOPISCHER ELEMENTE
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申请号: EP08869283.5申请日: 2008-10-10
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公开(公告)号: EP2198254A1公开(公告)日: 2010-06-23
- 发明人: BOUYGE, David , LESVIGNE-BUY, Christelle , COUDERC, Vincent , CRUNTEANU STANESCU, Aurélian , LEPROUX, Philippe , LEFORT, Laurent
- 申请人: Centre National de la Recherche Scientifique- CNRS , Université de Limoges
- 申请人地址: 3, rue Michel-Ange 75794 Paris Cedex 16 FR
- 专利权人: Centre National de la Recherche Scientifique- CNRS,Université de Limoges
- 当前专利权人: Centre National de la Recherche Scientifique- CNRS,Université de Limoges
- 当前专利权人地址: 3, rue Michel-Ange 75794 Paris Cedex 16 FR
- 代理机构: Novagraaf Technologies
- 优先权: FR0707098 20071010
- 国际公布: WO2009087287 20090716
- 主分类号: G01J3/44
- IPC分类号: G01J3/44 ; G01N21/64 ; G01N15/14
摘要:
The object of the invention is to provide a method and a device for characterizing microscopic elements, which is both reliable and inexpensive and which gives good results when there is a large number of elements to be characterized. For this purpose, the invention proposes chopping the source signal (12, 120) by means of MOEMS microsystems (200) based on optoelectromechanical elements (220), thereby generating novel options for the modulation, especially temporal modulation, of excitation signals. More precisely, one subject of the invention is a method of characterizing microscopic elements consisting in particular in propagating a dispersed lamp source signal (12, 120), in spatially chopping the spectrum of the source signal (12, 120) into at least two excitation signals (18, 180) having predetermined wavelengths λi, in encoding the excitation signals (18, 180), in focusing the excitation signals (18, 180), so as to generate a probe signal (28, 280) propagated towards a measurement zone (30, 300), and in analyzing an interaction signal (32, 320) deriving from the interaction of the probe signal (28, 280) with the microscopic elements that are located in the measurement space (30, 300). The spatial chopping of the light source signal spectrum is carried out by a MOEMS microsystem (200) based on optoelectromechanical elements (220).
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