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    PROCÉDÉ ET DISPOSITIF DE CARACTÉRISATION D'ÉLÉMENTS MICROSCOPIQUES
    1.
    发明公开
    PROCÉDÉ ET DISPOSITIF DE CARACTÉRISATION D'ÉLÉMENTS MICROSCOPIQUES 有权
    VERFAHREN UND VORRICHTUNG ZUR KENNZEICHNUNG MIKROSKOPISCHER ELEMENTE

    公开(公告)号：EP2198254A1

    公开(公告)日：2010-06-23

    申请号：EP08869283.5

    申请日：2008-10-10

    申请人： Centre National de la Recherche Scientifique- CNRS ,  Université de Limoges

    发明人： BOUYGE, David ,  LESVIGNE-BUY, Christelle ,  COUDERC, Vincent ,  CRUNTEANU STANESCU, Aurélian ,  LEPROUX, Philippe ,  LEFORT, Laurent

    IPC分类号： G01J3/44 ,  G01N21/64 ,  G01N15/14

    CPC分类号： G01J3/443 ,  G01J3/4406 ,  G01N21/645

    摘要： The object of the invention is to provide a method and a device for characterizing microscopic elements, which is both reliable and inexpensive and which gives good results when there is a large number of elements to be characterized. For this purpose, the invention proposes chopping the source signal (12, 120) by means of MOEMS microsystems (200) based on optoelectromechanical elements (220), thereby generating novel options for the modulation, especially temporal modulation, of excitation signals. More precisely, one subject of the invention is a method of characterizing microscopic elements consisting in particular in propagating a dispersed lamp source signal (12, 120), in spatially chopping the spectrum of the source signal (12, 120) into at least two excitation signals (18, 180) having predetermined wavelengths λi, in encoding the excitation signals (18, 180), in focusing the excitation signals (18, 180), so as to generate a probe signal (28, 280) propagated towards a measurement zone (30, 300), and in analyzing an interaction signal (32, 320) deriving from the interaction of the probe signal (28, 280) with the microscopic elements that are located in the measurement space (30, 300). The spatial chopping of the light source signal spectrum is carried out by a MOEMS microsystem (200) based on optoelectromechanical elements (220).

    摘要翻译： 提供用于表征微观元件的方法和装置。 源信号可以通过光机电元件（MOEMS）的微系统来切断，这导致激励信号的时间调制。 表征微观元素的方法涉及传播分散的光源信号，将源信号的光谱空间斩波成具有预定波长lambdai的至少两个激励信号，对激发信号进行编码，聚焦激励信号以产生传播的传感器信号 朝向测量区域，并且分析从传感器信号与位于测量空间中的微观元件的相互作用发出的相互作用信号。 源光信号的光谱的空间斩波由光机电元件（MOEMS）的微系统执行。