发明授权
- 专利标题: VORRICHTUNG UND VERFAHREN ZUR EINSEITIGEN NASSCHEMISCHEN UND/ODER ELEKTROLYTISCHEN BEHANDLUNG VON GUT
- 专利标题(英): Apparatus and process for the one-sided wet-chemical and/or electrolytic treatment of material
- 专利标题(中): 装置和方法单侧湿化学和/或良好的电解处理
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申请号: EP09765476.8申请日: 2009-05-08
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公开(公告)号: EP2201160B1公开(公告)日: 2012-10-31
- 发明人: BÜRGER, Norbert , DELAHAYE, Franck , KALTENBACH, Konrad
- 申请人: RENA GmbH
- 申请人地址: Ob der Eck 5 78148 Gütenbach DE
- 专利权人: RENA GmbH
- 当前专利权人: RENA GmbH
- 当前专利权人地址: Ob der Eck 5 78148 Gütenbach DE
- 代理机构: Stürken, Joachim
- 优先权: DE102008028847 20080619
- 国际公布: WO2009152896 20091223
- 主分类号: C25D5/08
- IPC分类号: C25D5/08 ; C25D7/12 ; C25D17/02 ; C25D17/06 ; H01L31/0224 ; H01L31/18 ; C25D5/02 ; C25D17/00
摘要:
The invention relates to the wet-chemical or electrolytic treatment of flat material, for example a wafer, which according to the prior art is treated by means of technically complex frames or grippers in treatment chambers. Particularly in the case of fracture-sensitive material such as silicon solar cells, the handling is very time-consuming, especially when the underside of the material must not be wetted. According to the invention, the material (1) is placed without frames, grippers or holders above a vertically arranged treatment chamber (3) so that only the underside is wetted by the treatment liquid. As a result of a rotationally symmetric flow (4) on the underside (7) of the material placed on the surface of a treatment liquid, the adhesion forces acting horizontally on the material (1) cancel one another out. A lateral shift of the material does not occur. The limiters or lateral end stops which are usually used can therefore be dispensed with.
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