发明公开
EP2203756A1 MAGNETIC FIELD SENSOR 有权
磁场传感器

  • 专利标题: MAGNETIC FIELD SENSOR
  • 专利标题(中): 磁场传感器
  • 申请号: EP08807981.9
    申请日: 2008-10-16
  • 公开(公告)号: EP2203756A1
    公开(公告)日: 2010-07-07
  • 发明人: ZIEREN, VictorWOLTERS, Robertus, A., M.
  • 申请人: NXP B.V.
  • 申请人地址: High Tech Campus 60 5656 AG Eindhoven NL
  • 专利权人: NXP B.V.
  • 当前专利权人: NXP B.V.
  • 当前专利权人地址: High Tech Campus 60 5656 AG Eindhoven NL
  • 代理机构: Krott, Michel
  • 优先权: EP07118816 20071018
  • 国际公布: WO2009050673 20090423
  • 主分类号: G01R33/06
  • IPC分类号: G01R33/06 H01L43/06
MAGNETIC FIELD SENSOR
摘要:
The invention relates to a magnetic field sensor comprising a substrate having a first side (S1). The substrate comprises at the first side (S1) a silicon comprising semiconductor layer (P-SUB) which comprises a buried N-well (DNW). A bipolar transistor having an emitter region (PE+, NE+), a base region (PB+, NB+), and a first collector region (CLR1) and a second collector region, is provided in the silicon comprising semiconductor layer (P-SUB). The emitter region (PE+, NE+) is located at the first side (S1) above the buried N-well (DNW). According to the invention the bipolar transistor is arranged such that, in operation, a part of an emitter current (IEM) that traverses the base region (PB+, NB+) is distributed over the first and second collector regions (CLR1, CLR2) obtaining a first and a second collector current (ICL1, ICL2), wherein a difference between the first and second collector currents (ICL1, ICL2) is determined by a magnetic field component (B x, B z ) perpendicular to a current plane. A bipolar magneto-transistor structure is obtained which is compatible with triple-well technology and that is sensitive to magnetic fields in a direction perpendicular to the current plane. The magnetic field sensor is compatible with triple-well technology and has a high linearity and a high sensitivity. The invention further relates to an integrated circuit comprising such magnetic field sensor (Snsr) and a card provided with such integrated circuit.
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