发明公开
- 专利标题: MAGNETIC FIELD SENSOR
- 专利标题(中): 磁场传感器
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申请号: EP08807981.9申请日: 2008-10-16
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公开(公告)号: EP2203756A1公开(公告)日: 2010-07-07
- 发明人: ZIEREN, Victor , WOLTERS, Robertus, A., M.
- 申请人: NXP B.V.
- 申请人地址: High Tech Campus 60 5656 AG Eindhoven NL
- 专利权人: NXP B.V.
- 当前专利权人: NXP B.V.
- 当前专利权人地址: High Tech Campus 60 5656 AG Eindhoven NL
- 代理机构: Krott, Michel
- 优先权: EP07118816 20071018
- 国际公布: WO2009050673 20090423
- 主分类号: G01R33/06
- IPC分类号: G01R33/06 ; H01L43/06
摘要:
The invention relates to a magnetic field sensor comprising a substrate having a first side (S1). The substrate comprises at the first side (S1) a silicon comprising semiconductor layer (P-SUB) which comprises a buried N-well (DNW). A bipolar transistor having an emitter region (PE+, NE+), a base region (PB+, NB+), and a first collector region (CLR1) and a second collector region, is provided in the silicon comprising semiconductor layer (P-SUB). The emitter region (PE+, NE+) is located at the first side (S1) above the buried N-well (DNW). According to the invention the bipolar transistor is arranged such that, in operation, a part of an emitter current (IEM) that traverses the base region (PB+, NB+) is distributed over the first and second collector regions (CLR1, CLR2) obtaining a first and a second collector current (ICL1, ICL2), wherein a difference between the first and second collector currents (ICL1, ICL2) is determined by a magnetic field component (B x, B z ) perpendicular to a current plane. A bipolar magneto-transistor structure is obtained which is compatible with triple-well technology and that is sensitive to magnetic fields in a direction perpendicular to the current plane. The magnetic field sensor is compatible with triple-well technology and has a high linearity and a high sensitivity. The invention further relates to an integrated circuit comprising such magnetic field sensor (Snsr) and a card provided with such integrated circuit.
公开/授权文献
- EP2203756B1 MAGNETIC FIELD SENSOR 公开/授权日:2011-04-13
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