发明授权
EP2204461B1 HIGH-PURITY YTTERBIUM, SPUTTERING TARGET MADE OF HIGH-PURITY YTTERBIUM, THIN FILM CONTAINING HIGH-PURITY YTTERBIUM, AND METHOD FOR PRODUCING HIGH-PURITY YTTERBIUM 有权
高纯度钇,高纯度镱溅射靶材,含高纯度钇的薄膜及生产高纯度钇的方法

HIGH-PURITY YTTERBIUM, SPUTTERING TARGET MADE OF HIGH-PURITY YTTERBIUM, THIN FILM CONTAINING HIGH-PURITY YTTERBIUM, AND METHOD FOR PRODUCING HIGH-PURITY YTTERBIUM
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