发明公开
- 专利标题: SILICON CARBIDE SINGLE CRYSTAL INGOT, AND SUBSTRATE AND EPITAXIAL WAFER OBTAINED FROM THE SILICON CARBIDE SINGLE CRYSTAL INGOT
- 专利标题(中): 单晶硅块和从单晶硅块,并收集衬底外延片
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申请号: EP09702431申请日: 2009-01-14
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公开(公告)号: EP2230332A4公开(公告)日: 2011-09-07
- 发明人: OHTANI NOBORU , KATSUNO MASAKAZU , TSUGE HIROSHI , NAKABAYASHI MASASHI , FUJIMOTO TATSUO
- 申请人: NIPPON STEEL CORP
- 专利权人: NIPPON STEEL CORP
- 当前专利权人: NIPPON STEEL CORP
- 优先权: JP2008005950 2008-01-15
- 主分类号: C30B29/36
- IPC分类号: C30B29/36
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