发明公开
EP2232224A2 IONIZATION GAUGE HAVING ELECTRON MULTIPLIER COLD EMMISSION SOURCE
审中-公开
IONISATIONSMESSGERÄT与电子倍增器冷任务SOURCE
- 专利标题: IONIZATION GAUGE HAVING ELECTRON MULTIPLIER COLD EMMISSION SOURCE
- 专利标题(中): IONISATIONSMESSGERÄT与电子倍增器冷任务SOURCE
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申请号: EP08868368.5申请日: 2008-12-17
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公开(公告)号: EP2232224A2公开(公告)日: 2010-09-29
- 发明人: BRUCKER, Gerardo, A.
- 申请人: Brooks Automation, Inc.
- 申请人地址: 15 Elizabeth Drive Building 11 Chelmsford, MA 01824 US
- 专利权人: Brooks Automation, Inc.
- 当前专利权人: Brooks Automation, Inc.
- 当前专利权人地址: 15 Elizabeth Drive Building 11 Chelmsford, MA 01824 US
- 代理机构: Jenkins, Peter David
- 优先权: US8185 20071219
- 国际公布: WO2009085165 20090709
- 主分类号: G01L21/34
- IPC分类号: G01L21/34 ; G01N27/62 ; H01J37/05 ; H01J41/04 ; G01L21/30
摘要:
An ionization gauge includes an electron generator array that includes a microchannel plate that includes an electron generating portion of the microchannel plate comprising a source for generating seed electrons and an electron multiplier portion of the microchannel plate, responsive to the seed electrons generated by the electron generating portion, that multiplies the electrons. The ionization gauge includes an ionization volume in which the electrons impact a gaseous species, and a collector electrode for collecting ions formed by the impact between the electrons and gas species. The collector electrode can be surrounded by the anode, or the ionization gauge can be formed with multiple collector electrodes. The source of electrons can provide for a spontaneous emission of electrons, where the electrons are multiplied in a cascade.
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