发明授权
EP2232539B1 METHODS FOR ISOLATING PORTIONS OF A LOOP OF PITCH-MULTIPLIED MATERIAL AND RELATED STRUCTURES 有权
式分离方法RASTERABSTANDVERVIELFACHTEM材料及相关结构的周期的部分

  • 专利标题: METHODS FOR ISOLATING PORTIONS OF A LOOP OF PITCH-MULTIPLIED MATERIAL AND RELATED STRUCTURES
  • 专利标题(中): 式分离方法RASTERABSTANDVERVIELFACHTEM材料及相关结构的周期的部分
  • 申请号: EP08861157.9
    申请日: 2008-12-16
  • 公开(公告)号: EP2232539B1
    公开(公告)日: 2016-02-17
  • 发明人: TRAN, Luan, C.
  • 申请人: Micron Technology, Inc.
  • 申请人地址: 8000 S. Federal Way P.O. Box 6 Boise, ID 83707 US
  • 专利权人: Micron Technology, Inc.
  • 当前专利权人: Micron Technology, Inc.
  • 当前专利权人地址: 8000 S. Federal Way P.O. Box 6 Boise, ID 83707 US
  • 代理机构: Small, Gary James
  • 优先权: US959409 20071218
  • 国际公布: WO2009079517 20090625
  • 主分类号: H01L21/8247
  • IPC分类号: H01L21/8247 H01L27/115 H01L21/033 H01L21/28
METHODS FOR ISOLATING PORTIONS OF A LOOP OF PITCH-MULTIPLIED MATERIAL AND RELATED STRUCTURES
摘要:
Different portions of a continuous loop of semiconductor material are electrically isolated from one another. In some embodiments, the end of the loop is electrically isolated from mid-portions of the loop. In some embodiments, loops of semiconductor material, having two legs connected together at their ends, are formed by a pitch multiplication process in which loops of spacers are formed on sidewalls of mandrels. The mandrels are removed and a block of masking material is overlaid on at least one end of the spacer loops. In some embodiments, the blocks of masking material overlay each end of the spacer loops. The pattern defined by the spacers and the blocks are transferred to a layer of semiconductor material. The blocks electrically connect together all the loops. A select gate is formed along each leg of the loops. The blocks serve as sources/drains. The select gates are biased in the off state to prevent current flow from the mid-portion of the loop's legs to the blocks, thereby electrically isolating the mid-portions from the ends of the loops and also electrically isolating different legs of a loop from each other.
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