发明公开
EP2238622A1 THREE-DIMENSIONAL HEXAGONAL MATRIX MEMORY ARRAY AND METHOD OF MANUFACTURING THE SAME 审中-公开
三维六点三角矩阵存储器阵列及其制造方法

THREE-DIMENSIONAL HEXAGONAL MATRIX MEMORY ARRAY AND METHOD OF MANUFACTURING THE SAME
摘要:
A nonvolatile memory device includes a plurality of nonvolatile memory cells arranged in a substantially hexagonal pattern. The nonvolatile memory cells may be pillar shaped non-volatile memory cells which can be patterned using triple or quadruple exposure lithography or by using a self -assembling layer. The cells are arranged in parallelogram-shaped subarrays. The bit lines cross the word lines at an angle of 60 degrees. The memory device can be a three-dimensional array.
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