发明公开
EP2238622A1 THREE-DIMENSIONAL HEXAGONAL MATRIX MEMORY ARRAY AND METHOD OF MANUFACTURING THE SAME
审中-公开
三维六点三角矩阵存储器阵列及其制造方法
- 专利标题: THREE-DIMENSIONAL HEXAGONAL MATRIX MEMORY ARRAY AND METHOD OF MANUFACTURING THE SAME
- 专利标题(中): 三维六点三角矩阵存储器阵列及其制造方法
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申请号: EP08867796.8申请日: 2008-11-05
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公开(公告)号: EP2238622A1公开(公告)日: 2010-10-13
- 发明人: SCHEUERLEIN, Roy, E. , PETTI, Christopher, J.
- 申请人: Sandisk 3D LLC
- 申请人地址: 601 McCarthy Boulevard Milpitas, CA 95035-7932 US
- 专利权人: Sandisk 3D LLC
- 当前专利权人: Sandisk 3D LLC
- 当前专利权人地址: 601 McCarthy Boulevard Milpitas, CA 95035-7932 US
- 代理机构: Tothill, John Paul
- 优先权: US5346 20071227
- 国际公布: WO2009085078 20090709
- 主分类号: H01L27/02
- IPC分类号: H01L27/02 ; H01L27/102 ; H01L27/105 ; H01L27/112 ; H01L27/22 ; H01L27/06 ; H01L27/24 ; H01L27/28 ; G03F1/00 ; G03F7/00 ; G03F7/16
摘要:
A nonvolatile memory device includes a plurality of nonvolatile memory cells arranged in a substantially hexagonal pattern. The nonvolatile memory cells may be pillar shaped non-volatile memory cells which can be patterned using triple or quadruple exposure lithography or by using a self -assembling layer. The cells are arranged in parallelogram-shaped subarrays. The bit lines cross the word lines at an angle of 60 degrees. The memory device can be a three-dimensional array.
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