- 专利标题: Microelectromechanical z-axis detection structure with low thermal drifts
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申请号: EP10171355.0申请日: 2010-07-30
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公开(公告)号: EP2284488B1公开(公告)日: 2018-12-05
- 发明人: Cazzaniga, Gabriele , Coronato, Luca , Simoni, Barbara
- 申请人: STMicroelectronics Srl
- 申请人地址: Via Olivetti 2 20864 Agrate Brianza IT
- 专利权人: STMicroelectronics Srl
- 当前专利权人: STMicroelectronics Srl
- 当前专利权人地址: Via Olivetti 2 20864 Agrate Brianza IT
- 代理机构: Cerbaro, Elena
- 优先权: ITTO20090597 20090731
- 主分类号: G01P15/125
- IPC分类号: G01P15/125 ; G01C19/5712 ; G01C19/5755 ; G01C19/5769 ; G01P15/08
摘要:
A MEMS detection structure (10) comprising a substrate (2) having a top surface (2a) with at least a first fixed-electrode arrangement (5a); a sensing mass (3) extending in a plane (xy) and suspended above the substrate (2) and above the first fixed-electrode arrangement (5a) at a separation distance; and connection elastic elements (8a, 8b) supporting the sensing mass (3) for being freely rotatable out of the plane (xy), modifying the separation distance as a function of a detected quantity along an axis (z) orthogonal to the plane (xy). The MEMS detection structure further comprises a coupling mass (12), suspended above the substrate (2) and connected to the sensing mass (3) via the connection elastic elements (8a, 8b) and an anchoring arrangement (14, 15), which anchors the coupling mass (12) to the substrate (2) with at least a first point of constraint (13), set at a distance from the rotation axis (A) and in a position corresponding to the first fixed-electrode arrangement (5a).
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