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    SENSOR AND ELECTRONIC DEVICE
    1.
    发明公开
    SENSOR AND ELECTRONIC DEVICE 审中-公开

    公开(公告)号：EP4187202A1

    公开(公告)日：2023-05-31

    申请号：EP22186073.7

    申请日：2022-07-20

    申请人： Kabushiki Kaisha Toshiba

    发明人： GANDO, Ryunosuke ,  ONO, Daiki ,  TOMIZAWA, Yasushi ,  MIYAZAKI, Fumito ,  KAJI, Shiori

    IPC分类号： G01C19/5726 ,  G01C19/574 ,  G01C19/5755

    摘要： According to one embodiment, a sensor includes a sensor element, and a controller. The sensor element includes a first sensor part. The first sensor part includes a first movable part which can vibrate. Vibration of the first movable part includes a first component and a second component. The controller is configured to perform to third mode operations. In the first mode operation, the controller is configured to derive a first rotation angle of the first movable part based on a first amplitude of the first component and a second amplitude of the second component. In the second mode operation, the controller is configured to derive a first angular velocity of the first movable part based on a change of a control signal. In the third mode operation, the controller is configured to supply a third mode signal to the first sensor part.

    MEMS SENSOR WITH DECOUPLED DRIVE SYSTEM
    2.
    发明公开
    MEMS SENSOR WITH DECOUPLED DRIVE SYSTEM 审中-公开

    公开(公告)号：EP4166903A1

    公开(公告)日：2023-04-19

    申请号：EP22212811.8

    申请日：2015-05-14

    申请人： InvenSense, Inc.

    发明人： ANAC, Ozan ,  SEEGER, Joseph

    IPC分类号： G01C19/574 ,  G01C19/5755

    摘要： In a first aspect, the angular rate sensor comprises a substrate and a rotating structure anchored to the substrate. The angular rate sensor also includes a drive mass anchored to the substrate and an element coupling the drive mass and the rotating structure. The angular rate sensor further includes an actuator for driving the drive mass into oscillation along a first axis in plane to the substrate and for driving the rotating structure into rotational oscillation around a second axis normal to the substrate; a first transducer to sense the motion of the rotating structure in response to a Coriolis force in a sense mode; and a second transducer to sense the motion of the sensor during a drive mode. In a second aspect the angular rate sensor comprises a substrate and two shear masses which are parallel to the substrate and anchored to the substrate via flexible elements.

    A MEMS GYROSCOPE HAVING A HIGH STABILITY WITH RESPECT TO TEMPERATURE AND HUMIDITY VARIATIONS
    5.
    发明公开
    A MEMS GYROSCOPE HAVING A HIGH STABILITY WITH RESPECT TO TEMPERATURE AND HUMIDITY VARIATIONS 审中-公开
    MEMS陀螺仪在温度和湿度变化方面具有高稳定性

    公开(公告)号：EP3301398A1

    公开(公告)日：2018-04-04

    申请号：EP17162662.5

    申请日：2017-03-23

    申请人： STMicroelectronics S.r.l.

    发明人： GATTERE, Gabriele ,  TOCCHIO, Alessandro ,  VALZASINA, Carlo

    IPC分类号： G01C19/5726 ,  G01C19/574 ,  G01C19/5755

    摘要： A MEMS device including a main die (22) that may be coupled to a secondary die (2), which forms a frame (4), and at least one first mobile mass (6) elastically coupled to the frame, the main die (22) forming: a driving stage (20, 24) that drives the first mobile mass so that it oscillates, parallel to a first direction, with frequency-modulated displacements; and a processing stage (35), which generates an output signal indicating an angular velocity of the MEMS device (100) as a function of displacements parallel to a second direction that are made by the first mobile mass, when driven by the driving stage, on account of a Coriolis force.

    摘要翻译： 一种MEMS器件，包括可以耦合到形成框架（4）的次级管芯（2）的主模具（22）以及弹性耦合到框架的至少一个第一移动质量块（6），主管芯 22）形成：驱动台（20,24），所述驱动台驱动所述第一可移动质量块，使得所述第一可移动质量块平行于第一方向以频率调制位移振荡; 以及处理级（35），当由所述驱动级驱动时，所述处理级生成表示所述MEMS装置（100）的角速度的输出信号，所述输出信号作为由所述第一移动质量块形成的平行于第二方向的位移的函数， 由于科里奥利部队。

    MEMS SENSOR WITH DECOUPLED DRIVE SYSTEM
    7.
    发明公开
    MEMS SENSOR WITH DECOUPLED DRIVE SYSTEM 审中-公开
    MEMS传感器与分离的驱动系统

    公开(公告)号：EP2955480A3

    公开(公告)日：2016-03-16

    申请号：EP15167772.1

    申请日：2015-05-14

    申请人： InvenSense, Inc.

    发明人： Anac, Ozan ,  Seeger, Joseph

    IPC分类号： G01C19/574 ,  G01C19/5755

    CPC分类号： G01C19/574 ,  G01C19/5755

    摘要： In a first aspect, the angular rate sensor comprises a substrate and a rotating structure anchored to the substrate. The angular rate sensor also includes a drive mass anchored to the substrate and an element coupling the drive mass and the rotating structure. The angular rate sensor further includes an actuator for driving the drive mass into oscillation along a first axis in plane to the substrate and for driving the rotating structure into rotational oscillation around a second axis normal to the substrate; a first transducer to sense the motion of the rotating structure in response to a Coriolis force in a sense mode; and a second transducer to sense the motion of the sensor during a drive mode. In a second aspect the angular rate sensor comprises a substrate and two shear masses which are parallel to the substrate and anchored to the substrate via flexible elements.