发明公开
EP2300355A1 BONDED MICROFLUIDICS SYSTEM COMPRISING CMOS-CONTROLLABLE MICROFLUIDIC DEVICES
审中-公开
与CMOS应税MICRO DEVICES流体保税微流体系统
- 专利标题： BONDED MICROFLUIDICS SYSTEM COMPRISING CMOS-CONTROLLABLE MICROFLUIDIC DEVICES
- 专利标题（中）： 与CMOS应税MICRO DEVICES流体保税微流体系统
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申请号： EP08756961.2申请日： 2008-06-20
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公开(公告)号： EP2300355A1公开(公告)日： 2011-03-30
- 发明人: MCAVOY, Gregory John , KERR, Emma Rose , SILVERBROOK, Kia
- 申请人： Silverbrook Research Pty Ltd
- 申请人地址： 393 Darling Street Balmain, NSW 2041 AU
- 专利权人： Silverbrook Research Pty Ltd
- 当前专利权人： Silverbrook Research Pty Ltd
- 当前专利权人地址： 393 Darling Street Balmain, NSW 2041 AU
- 代理机构： Keane, Paul Fachtna
- 国际公布： WO2009152547 20091223
- 主分类号： B81B7/02
- IPC分类号： B81B7/02 ; B81B3/00 ; G01N27/00 ; G01N35/00
摘要：
A microfluidic system comprising an integrated circuit having a bonding surface bonded to a polymeric microfluidics platform. The microfluidic system comprises one or more microfluidics devices controlled by control circuitry in the integrated circuit. At least one of the microfluidic devices comprises a MEMS actuator positioned in a MEMS layer of the integrated circuit. The MEMS layer is covered with a polymeric layer which defines the bonding surface of the integrated circuit.
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