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    60 GHZ WIDEBAND CLASS E/F2 POWER AMPLIFIER
    1.
    发明公开
    60 GHZ WIDEBAND CLASS E/F2 POWER AMPLIFIER 审中-公开
    60 GHZ宽带类E / F2功率放大器

    公开(公告)号：EP3202032A1

    公开(公告)日：2017-08-09

    申请号：EP15847423.9

    申请日：2015-10-03

    申请人： Zaretsky, Howard

    发明人： BABAIE, Masoud ,  STASZEWSKI, Robert, Bogdan

    IPC分类号： H03F3/189

    CPC分类号： H03H7/38 ,  H01F27/2823 ,  H01F27/29 ,  H01Q1/50 ,  H03F1/0205 ,  H03F1/565 ,  H03F3/193 ,  H03F3/211 ,  H03F3/2171 ,  H03F3/2176 ,  H03F3/245 ,  H03F2200/318 ,  H03F2200/451 ,  H03F2200/534 ,  H03F2200/537 ,  H03F2200/541 ,  H03F2203/21106 ,  H03F2203/21139 ,  H03H7/09 ,  H03H7/40 ,  H03H7/425 ,  H03H7/427 ,  H03H7/48

    摘要： A novel and useful transmitter (TX) architecture for ultra-low power (ULP) radios. An all-digital PLL employs a digitally controlled oscillator (DCO) having switching current sources to reduce supply voltage and power consumption without sacrificing phase noise and startup margins. It also reduces 1/f noise allowing the ADPLL after settling to reduce its sampling rate or shut it off entirely during direct DCO data modulation. A switching power amplifier integrates its matching network while operating in class-E/F2 to maximally enhance its efficiency. The transmitter has been realized in 28 nm CMOS and satisfies all metal density and other manufacturing rules. It consumes 3.6 mW/5.5 mW while delivering 0 dBm/3 dBm RF power in Bluetooth Low-Energy.

    摘要翻译： 一种用于超低功率（ULP）无线电的新颖且有用的发射机（TX）架构。 全数字PLL采用具有开关电流源的数字控制振荡器（DCO）来降低电源电压和功耗，而不会牺牲相位噪声和启动裕度。 它还降低了1 / f噪声，从而使ADPLL在建立后降低采样率或在直接DCO数据调制期间完全关闭。 开关功率放大器集成了其匹配网络，同时在E / F2级工作，最大限度地提高了效率。 该发射器已实现在28纳米CMOS，并满足所有金属密度和其他制造规则。 它在蓝牙低功耗模式下提供0 dBm / 3 dBm射频功率，功耗为3.6 mW / 5.5 mW。

    METHOD AND SYSTEM FOR MEASURING RADIATION AND TEMPERATURE EXPOSURE OF WAFERS ALONG A FABRICATION PROCESS LINE
    2.
    发明公开
    METHOD AND SYSTEM FOR MEASURING RADIATION AND TEMPERATURE EXPOSURE OF WAFERS ALONG A FABRICATION PROCESS LINE 审中-公开
    用于测量制造工艺线上的晶片的辐射和温度暴露的方法和系统

    公开(公告)号：EP3201942A1

    公开(公告)日：2017-08-09

    申请号：EP15851269.9

    申请日：2015-10-13

    申请人： KLA - Tencor Corporation

    发明人： SUN, Mei ,  JENSEN, Earl ,  O'BRIEN, Kevin

    IPC分类号： H01L21/66

    CPC分类号： G01J1/429 ,  G01J1/0204 ,  G01J1/0271 ,  G01J1/0407 ,  G01J1/58 ,  G01J5/04 ,  G01J5/0818 ,  G01J5/10 ,  G01K11/20 ,  H01L21/67248 ,  H01L21/67253 ,  H01L22/10

    摘要： A measurement wafer device for measuring radiation intensity and temperature includes a wafer assembly including one or more cavities. The measurement wafer device further includes a detector assembly. The detector assembly is disposed within the one or more cavities of the wafer assembly. The detector assembly includes one or more light sensors. The detector assembly is further configured to perform a direct or indirect measurement of the intensity of ultraviolet light incident on a surface of the wafer assembly. The detector assembly is further configured to determine a temperature of one or more portions of the wafer assembly based on one or more characteristics of the one or more light sensors.

    摘要翻译： 用于测量辐射强度和温度的测量晶片装置包括含有一个或多个空腔的晶片组件。 测量晶片装置还包括检测器组件。 检测器组件设置在晶片组件的一个或多个空腔内。 检测器组件包括一个或多个光传感器。 检测器组件还被配置为执行入射在晶片组件的表面上的紫外光的强度的直接或间接测量。 检测器组件还被配置成基于一个或多个光传感器的一个或多个特性来确定晶片组件的一个或多个部分的温度。

    THERMAL MANAGEMENT VALVE
    3.
    发明授权
    THERMAL MANAGEMENT VALVE 有权
    热管理阀

    公开(公告)号：EP3039320B1

    公开(公告)日：2017-07-26

    申请号：EP14744980.5

    申请日：2014-06-18

    申请人： Flextronics Automotive, Inc.

    发明人： PETERSON, Matthew

    IPC分类号： F16K11/044 ,  F16K27/02

    CPC分类号： F16K11/044 ,  F16K31/06 ,  F16K31/0627 ,  Y10T137/86815 ,  Y10T137/86879

    摘要： A three-port fluid control valve and a valve assembly using the fluid control valve are provided herein. The valve includes a first inlet, a second inlet, and a sealing element to selectably open one inlet to fluid communication with an outlet and to close the other inlet to fluid communication with the outlet. The valve system includes an actuator, for example a solenoid, to provide accurate and responsive control of the position of the sealing element.

    摘要翻译： 这里提供了三通流体控制阀和使用流体控制阀的阀组件。 阀包括第一入口，第二入口和密封元件，以选择性地打开一个入口以与出口流体连通并关闭另一个入口以与出口流体连通。 阀系统包括致动器，例如螺线管，以提供密封元件的位置的准确和响应的控制。

    SCANNING ELECTRON MICROSCOPE AND METHODS OF INSPECTING AND REVIEWING SAMPLES
    7.
    发明公开
    SCANNING ELECTRON MICROSCOPE AND METHODS OF INSPECTING AND REVIEWING SAMPLES 审中-公开
    腓特烈港民主主义人民共和国

    公开(公告)号：EP3140849A1

    公开(公告)日：2017-03-15

    申请号：EP15835724.4

    申请日：2015-08-28

    申请人： KLA - Tencor Corporation

    发明人： BROWN, David L. ,  CHUANG, Yung-Ho Alex ,  FIELDEN, John ,  TRIMPL, Marcel ,  ZHANG, Jingjing ,  CONTARATO, Devis ,  IYER, Venkatraman

    IPC分类号： H01J37/28

    CPC分类号： G01N30/72 ,  G01T1/24 ,  G06F19/00 ,  H01J37/244 ,  H01J37/28 ,  H01J49/02 ,  H01J2237/2441 ,  H01J2237/2446 ,  H01J2237/24475 ,  H01J2237/24495 ,  H01J2237/24592 ,  H01L27/1464 ,  H01L27/14659 ,  H01L27/14661 ,  H01L31/00

    摘要： A scanning electron microscope incorporates a multi-pixel solid-state electron detector. The multi-pixel solid-state detector may detect back-scattered and/or secondary electrons. The multi-pixel solid-state detector may incorporate analog-to-digital converters and other circuits. The multi-pixel solid state detector may be capable of approximately determining the energy of incident electrons and/or may contain circuits for processing or analyzing the electron signals. The multi-pixel solid state detector is suitable for high-speed operation such as at a speed of about 100 MHz or higher. The scanning electron microscope may be used for reviewing, inspecting or measuring a sample such as unpatterned semiconductor wafer, a patterned semiconductor wafer, a reticle or a photomask. A method of reviewing or inspecting a sample is also described.

    摘要翻译： 扫描电子显微镜结合了多像素固态电子检测器。 多像素固态检测器可以检测反向散射和/或二次电子。 多像素固态检测器可以并入模数转换器和其他电路。 多像素固态检测器可以能够近似地确定入射电子的能量和/或可以包含用于处理或分析电子信号的电路。 多像素固态检测器适用于高速操作，例如以大约100MHz或更高的速度。 扫描电子显微镜可以用于检查，检查或测量诸如未图案化的半导体晶片，图案化半导体晶片，掩模版或光掩模的样品。 还描述了检查或检查样品的方法。

    FOCUS MEASUREMENTS USING SCATTEROMETRY METROLOGY
    8.
    发明公开
    FOCUS MEASUREMENTS USING SCATTEROMETRY METROLOGY 审中-公开
    FOKUSMESSUNGEN MIT SCATTEROMETRIE

    公开(公告)号：EP3126893A1

    公开(公告)日：2017-02-08

    申请号：EP15774184.4

    申请日：2015-03-30

    申请人： Kla-Tencor Corporation

    发明人： EL KODADI, Mohammed ,  AMIR, Nuriel ,  VOLKOVICH, Roie ,  LEVINSKI, Vladimir ,  FELER, Yoel ,  KANDEL, Daniel ,  GUTMAN, Nadav ,  PANDEV, Stilian ,  SANKO, Dzmitry

    IPC分类号： G02B15/14 ,  H04N7/18

    CPC分类号： G06F17/5081 ,  G01N21/4785 ,  G03F7/70641 ,  G03F7/70683 ,  G06F17/5072

    摘要： Target designs and methods are provided, which relate to periodic structures having elements recurring with a first pitch in a first direction. The elements are periodic with a second pitch along a second direction that is perpendicular to the first direction and are characterized in the second direction by alternating, focus-sensitive and focus-insensitive patterns with the second pitch. In the produced targets, the first pitch may be about the device pitch and the second pitch may be several times larger. The first, focus-insensitive pattern may be produced to yield a first critical dimension and the second, focus-sensitive pattern may be produced to yield a second critical dimension that may be equal to the first critical dimension only when specified focus requirements are satisfied, or provide scatterometry measurements of zeroth as well as first diffraction orders, based on the longer pitch along the perpendicular direction.

    摘要翻译： 提供了目标设计和方法，其涉及具有在第一方向上以第一间距重复的元件的周期性结构。 这些元件沿着与第一方向垂直的第二方向具有第二间距周期性，并且通过具有第二间距的交替的聚焦敏感和对焦不敏感图案在第二方向上表征。 在所产生的目标中，第一节距可以是关于装置间距，并且第二节距可以是数倍大。 可以产生第一个不对焦模式，以产生第一关键尺寸，并且可以产生第二焦点敏感图案以产生仅当满足指定焦点要求时可以等于第一临界尺寸的第二临界尺寸， 或者基于沿着垂直方向的较长的间距来提供零和第一衍射级的散射测量。

    VARIABLE IMAGE FIELD CURVATURE FOR OBJECT INSPECTION
    9.
    发明公开
    VARIABLE IMAGE FIELD CURVATURE FOR OBJECT INSPECTION 审中-公开
    可变的BILDFELDKRÜMMUNGZUR OBJEKTINSPEKTION

    公开(公告)号：EP3123501A1

    公开(公告)日：2017-02-01

    申请号：EP15768284.0

    申请日：2015-03-25

    申请人： Kla-Tencor Corporation

    发明人： HORN, Paul

    IPC分类号： H01L21/66

    CPC分类号： G01N21/8851 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2201/06113 ,  G01N2201/105 ,  H01L22/12

    摘要： Field curvature of an optical system is modified based on topography of the surface of a wafer such that an image of each of the segments of the surface is in focus across the segment. The wafer may be non-planar. The optical system may be a multi-element lens system connected to a controller that modifies the field curvature by changing position of the lens elements. The wafer may be held by a chuck, such as an edge grip chuck. Multiple optical systems may be arranged across a dimension of the wafer.

    摘要翻译： 基于晶片的表面的形貌修改光学系统的场曲率，使得表面的每个段的图像跨越该段聚焦。 晶片可以是非平面的。 光学系统可以是连接到通过改变透镜元件的位置来改变场曲率的控制器的多元件透镜系统。 晶片可以由诸如边缘夹具的卡盘来保持。 多个光学系统可以跨越晶片的尺寸布置。

    SYSTEMS AND METHODS FOR COOPERATIVE APPLICATIONS IN COMMUNICATION SYSTEMS
    10.
    发明授权
    SYSTEMS AND METHODS FOR COOPERATIVE APPLICATIONS IN COMMUNICATION SYSTEMS 有权
    系统VERFAHRENFÜRKOMMUNIKATIONSSYSTEMEN KOOPERATIVE ANWENDUNGEN

    公开(公告)号：EP2859769B1

    公开(公告)日：2017-02-01

    申请号：EP13730971.2

    申请日：2013-05-29

    申请人： WI-LAN LABS, INC.

    发明人： XU, Haibo ,  CHINNATHAMBI, Gopinath Murali ,  GELL, David ,  STANWOOD, Kenneth L. ,  COLBAN, Erik

    IPC分类号： H04W72/12

    CPC分类号： H04W28/10 ,  H04L47/127 ,  H04L47/30 ,  H04W4/60

    摘要： Systems and methods provide communications between applications in terminal nodes and applications agents in access nodes. The APP-agent cooperative communications can be used to improve quality of experience for users or the terminal nodes. An access node may, for example, have a parameterized scheduling system that incorporates information from the APP-agent cooperative communications in determining scheduling parameters. An application at a terminal node may, for example, modify requests for communication based on information about communication capabilities received from an access node. For APP-agent cooperative communications for multiple applications, an access node may include a master application agent to facilitate and coordinate communications to specific application agents that address APP-agent cooperative communications for specific applications. Similarly, a terminal node may use a master application and specific applications for APP-agent cooperative communications.

    摘要翻译： 系统和方法提供终端节点中的应用和接入节点中的应用代理之间的通信。 APP-agent协作通信可以用于提高用户或终端节点的体验质量。 例如，访问节点可以具有参数化的调度系统，其在确定调度参数中包含来自APP代理协作通信的信息。 终端节点的应用可以例如基于从接入节点接收的关于通信能力的信息来修改通信请求。 对于用于多个应用的​​APP代理协作通信，接入节点可以包括主应用代理，以促进和协调与针对特定应用的APP-agent协作通信的特定应用代理的通信。 类似地，终端节点可以使用主应用和特定应用来进行APP代理协作通信。