- 专利标题： TELECENTRICITY CORRECTOR FOR MICROLITHOGRAPHIC PROJECTION SYSTEM
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申请号： EP09788838.2申请日： 2009-06-25
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公开(公告)号： EP2310914B1公开(公告)日： 2018-12-26
- 发明人: CORNELL, Jim, D. , MALACH, Joseph, D. , MICHALOSKI, Paul, F. , WEBB, James, E.
- 申请人： Corning Incorporated
- 申请人地址： 1 Riverfront Plaza Corning, NY 14831 US
- 专利权人： Corning Incorporated
- 当前专利权人： Corning Incorporated
- 当前专利权人地址： 1 Riverfront Plaza Corning, NY 14831 US
- 代理机构： Elkington & Fife LLP
- 优先权： US76888 20080630
- 国际公布： WO2010005491 20100114
- 主分类号： G03F7/20
- IPC分类号： G03F7/20 ; G02B13/22 ; G02B27/42 ; G02B27/00
摘要：
A telecentricity corrector is incorporated into a microlithographic projection system to achieve telecentricity targets at the output of the microlithographic projection system. The telecentricity corrector is located between an illuminator and a projection lens of the projection system, preferably just in advance of a reticle for controlling angular distributions of light illuminating the reticle.
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