-
公开(公告)号：EP2310914B1
公开(公告)日：2018-12-26
申请号：EP09788838.2
申请日：2009-06-25
申请人： Corning Incorporated
CPC分类号： G03F7/70191 , G02B13/22 , G02B27/0043 , G02B27/4222
摘要： A telecentricity corrector is incorporated into a microlithographic projection system to achieve telecentricity targets at the output of the microlithographic projection system. The telecentricity corrector is located between an illuminator and a projection lens of the projection system, preferably just in advance of a reticle for controlling angular distributions of light illuminating the reticle.
-
公开(公告)号：EP2310914A1
公开(公告)日：2011-04-20
申请号：EP09788838.2
申请日：2009-06-25
申请人： Corning Incorporated
CPC分类号： G03F7/70191 , G02B13/22 , G02B27/0043 , G02B27/4222
摘要： A telecentricity corrector is incorporated into a microlithographic projection system to achieve telecentricity targets at the output of the microlithographic projection system. The telecentricity corrector is located between an illuminator and a projection lens of the projection system, preferably just in advance of a reticle for controlling angular distributions of light illuminating the reticle.
摘要翻译： 远心校正器被结合到微光刻投影系统中以实现微光刻投影系统的输出处的远心目标。 远心校正器位于投影系统的照明器和投影透镜之间，优选恰好在用于控制照射标线片的光的角度分布的光罩之前。
-
公开(公告)号：EP2470936B1
公开(公告)日：2019-12-11
申请号：EP10757654.8
申请日：2010-08-26
申请人： Corning Incorporated
发明人： CORNELL, Jim, D. , SANSON, Mark, C.
IPC分类号： G02B13/14 , G02B13/16 , G02B15/173
-
公开(公告)号：EP2470936A1
公开(公告)日：2012-07-04
申请号：EP10757654.8
申请日：2010-08-26
申请人： Corning Incorporated
发明人： CORNELL, Jim, D. , SANSON, Mark, C.
IPC分类号： G02B13/14 , G02B13/16 , G02B15/173
摘要： A mid infrared spectral band continuous zoom system is described herein that can provide a continuous zoom range with a focal length change greater than 25× when thermally imaging a distant object. In addition, a method is described herein for using the mid infrared spectral band continuous zoom system to thermally image the distant object.
-
-
-
搜索结果
4 条记录 (耗时 0.007 秒)
