发明公开
EP2400522A1 Blocking member for use in the diffraction plane of a TEM
审中-公开
在einer TEM-Brechungsebene中的Blockierelement zur Verwendung
- 专利标题: Blocking member for use in the diffraction plane of a TEM
- 专利标题(中): 在einer TEM-Brechungsebene中的Blockierelement zur Verwendung
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申请号: EP10167258.2申请日: 2010-06-24
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公开(公告)号: EP2400522A1公开(公告)日: 2011-12-28
- 发明人: Tiemeijer, Peter , Buijsse, Bart
- 申请人: FEI COMPANY
- 申请人地址: 5350 NE Dawson Creek Drive Hillsboro, Oregon 97124-5793 US
- 专利权人: FEI COMPANY
- 当前专利权人: FEI COMPANY
- 当前专利权人地址: 5350 NE Dawson Creek Drive Hillsboro, Oregon 97124-5793 US
- 代理机构: Bakker, Hendrik
- 主分类号: H01J37/09
- IPC分类号: H01J37/09 ; H01J37/26
摘要:
The invention relates to a blocking member to be placed in the diffraction plane of a TEM. It resembles the knife edge used for single sideband imaging, but blocks only electrons deflected over a small angle. As a result the Contrast Transfer Function of the TEM according to this invention will equal that of a single sideband microscope at low frequencies and that of a normal microscope for high frequencies. Preferable the highest frequency blocked by the blocking member is such that a microscope without the blocking member would show a CTF of 0.5.
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