利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

1065 条记录 (耗时 0.021 秒)

    IMPROVED DETECTORS FOR MICROSCOPY
    2.
    发明公开
    IMPROVED DETECTORS FOR MICROSCOPY 审中-实审

    公开(公告)号：EP4394456A3

    公开(公告)日：2024-07-10

    申请号：EP23216423.6

    申请日：2023-12-13

    申请人： FEI Company

    发明人： MELE, Luigi ,  ANNE VAN VEEN, Gerard Nicolaas ,  TIEMEIJER, Peter Christiaan

    IPC分类号： G01T1/24 ,  G01T1/29

    CPC分类号： G01T1/2928 ,  G01T1/24

    摘要： Improved detectors for microscopy are described herein. In one aspect, an apparatus can include: a plurality of electronic units arranged in an array; a plurality of pixels, each pixel of the plurality of pixels coupled to an associated electronic unit of the plurality of electronic units, wherein a first subset of pixels of the plurality of pixels is formed from a first material, and wherein a second subset of pixels of the plurality of pixels is formed from a second material, the first material being different than the first material, and a plurality of electrical connections disposed between the plurality of electronic units and the plurality of pixels, where each electrical connection connects respective electronic units with an associated pixel.

    ELECTRON DIFFRACTION HOLOGRAPHY
    4.
    发明公开
    ELECTRON DIFFRACTION HOLOGRAPHY 审中-实审

    公开(公告)号：EP4318546A3

    公开(公告)日：2024-04-24

    申请号：EP23206141.6

    申请日：2021-03-25

    申请人： FEI Company

    发明人： Henstra, Alexander ,  Deng, Yuchen ,  Kohr, Holger

    IPC分类号： H01J37/04 ,  H01J37/26

    CPC分类号： H01J2237/261420130101 ,  H01J37/04 ,  H01J37/26 ,  H01J2237/049220130101 ,  H01J2237/1520130101

    摘要： Methods for using electron diffraction holography to investigate a sample, according to the present disclosure include the initial steps of emitting a plurality of electrons toward the sample, forming the plurality of electrons into a first electron beam and a second electron beam, and modifying the focal properties of at least one of the two beams such that the two beams have different focal planes. Once the two beams have different focal planes, the methods include focusing the first electron beam such that it has a focal plane at or near the sample, and focusing the second electron beam so that it is incident on the sample, and has a focal plane in the diffraction plane. An interference pattern of the first electron beam and the diffracted second electron beam is then detected in the diffraction plane, and then used to generate a diffraction holograph.

    METHOD OF EXAMINING A SAMPLE USING A CHARGED PARTICLE MICROSCOPE
    7.
    发明公开
    METHOD OF EXAMINING A SAMPLE USING A CHARGED PARTICLE MICROSCOPE 审中-公开

    公开(公告)号：EP3736849A1

    公开(公告)日：2020-11-11

    申请号：EP19172810.4

    申请日：2019-05-06

    申请人： FEI Company

    发明人： Klusácek, Jan ,  Tuma, Tomás

    IPC分类号： H01J37/244 ,  G01N23/2252 ,  G06T11/00 ,  H01J37/28

    摘要： The invention relates to a method of examining a sample using a charged particle microscope, comprising the steps of providing a charged particle beam, as well as a sample, and scanning said charged particle beam over at least part of said sample. A first detector is used for obtaining measured detector signals corresponding to emissions of a first type from the sample at a plurality of sample positions. According to the method, a set of data class elements is provided, wherein each data class element relates an expected detector signal to a corresponding sample information value. The measured detector signals are processed, and processing comprises comparing said measured detector signals to said set of data class elements; determining at least one probability that said measured detector signals belong to a certain one of said set of data class elements; and assigning at least one sample information value and said at least one probability to each of the plurality of sample positions. Finally, sample information values and corresponding probability can be represented in data.

    CHARGED PARTICLE BEAM DEVICE FOR INSPECTION OF A SPECIMEN WITH A PLURALITY OF CHARGED PARTICLE BEAMLETS
    9.
    发明公开
    CHARGED PARTICLE BEAM DEVICE FOR INSPECTION OF A SPECIMEN WITH A PLURALITY OF CHARGED PARTICLE BEAMLETS 审中-公开

    公开(公告)号：EP3716312A1

    公开(公告)日：2020-09-30

    申请号：EP19165969.7

    申请日：2019-03-28

    申请人： FEI Company

    发明人： Hlavenka, Petr ,  Sed'a, Bohuslav

    IPC分类号： H01J37/244 ,  H01J37/28

    摘要： The invention relates to a charged particle beam device for inspection of a specimen with a plurality of charged particle beamlets. The charged particle beam device comprises a specimen holder for holding a specimen, a source for producing a beam of charged particles, and an illuminator for converting said beam of charged particles into a plurality of charged particle beamlets and focusing said plurality of charged particle beamlets onto said specimen. Furthermore, a detector assembly for detecting a flux of radiation emanating from the specimen in response to said irradiation by said plurality of charged particle beamlets is provided. As defined herein, the charged particle beam device is arranged for directing said plurality of charged particle beamlets onto said specimen in an essentially 1D pattern, wherein said essentially 1D pattern forms part of an edge of an essentially 2D geometric shape. Furthermore, the detector assembly comprises a plurality of detector units arranged in a corresponding essentially 1D pattern.

    ARTIFICIAL INTELLIGENCE ENABLED VOLUME RECONSTRUCTION
    10.
    发明公开
    ARTIFICIAL INTELLIGENCE ENABLED VOLUME RECONSTRUCTION 审中-公开

    公开(公告)号：EP3716215A1

    公开(公告)日：2020-09-30

    申请号：EP20163630.5

    申请日：2020-03-17

    申请人： FEI Company

    发明人： Poto ek, Pavel ,  Boughorbel, Faysal ,  Peemen, Maurice

    IPC分类号： G06T11/00 ,  H01J37/22

    摘要： Methods and apparatuses for implementing artificial intelligence enabled volume reconstruction are disclosed herein. An example method at least includes acquiring a first plurality of multi-energy images of a surface of a sample, each image of the first plurality of multi-energy images obtained at a different beam energy, where each image of the first plurality of multi-energy images include data from a different depth within the sample, and reconstructing, by an artificial neural network, at least a volume of the sample based on the first plurality of multi-energy images, where a resolution of the reconstruction is greater than a resolution of the first plurality of multi-energy images.