发明授权
EP2414773B1 METHOD FOR DETECTING ACCELERATIONS AND ROTATION RATES, AND MEMS SENSOR
有权
法的加速和旋转速度和MEMS传感器的检测
- 专利标题: METHOD FOR DETECTING ACCELERATIONS AND ROTATION RATES, AND MEMS SENSOR
- 专利标题(中): 法的加速和旋转速度和MEMS传感器的检测
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申请号: EP10713141.9申请日: 2010-02-22
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公开(公告)号: EP2414773B1公开(公告)日: 2013-10-09
- 发明人: ROCCHI, Alessandro
- 申请人: Maxim Integrated GmbH
- 申请人地址: Schloss Eybesfeld Jöss 1e 8403 Lebring AT
- 专利权人: Maxim Integrated GmbH
- 当前专利权人: Maxim Integrated GmbH
- 当前专利权人地址: Schloss Eybesfeld Jöss 1e 8403 Lebring AT
- 代理机构: Bergmeier, Werner
- 优先权: DE102009002066 20090331
- 国际公布: WO2010112268 20101007
- 主分类号: G01P15/14
- IPC分类号: G01P15/14 ; G01C19/5747 ; G01C19/5762
摘要:
The invention concerns a MEMS sensor and a method for detecting accelerations along, and rotation rates about, at least one, preferably two of three mutually perpendicular spatial axes x, y and z by means of a MEMS sensor (1), wherein at least one driving mass (6; 6.1, 6.2) and at least one sensor mass (5) are moveably arranged on a substrate (2) and the at least one driving mass (6; 6.1, 6.2) is moved relative to the at least one sensor mass (5) in oscillation at a driving frequency and when an external acceleration of the sensor occurs, driving mass/es (6; 6.1, 6.2) and sensor mass/es (5) are deflected at an acceleration frequency and, when an external rotation rate of the sensor (1) occurs, are deflected at a rotation rate frequency, and the acceleration frequency and rotation rate frequency are different. At the MEMS-sensor the driving mass/es (6; 6.1, 6.2) and sensor mass/es (5) are arranged on the substrate (2), and are balanced in the resting state by means of at least one of the anchors (3). In the driving mode the driving mass/es (6; 6.1, 6.2), when vibrating in oscillation about this at least one anchor (3), generate/s an imbalance of the driving mass/es (6; 6.1, 6.2) and the sensor mass/es (5) with respect to this at least one anchor (3), and the sensor elements detect deflections of the driving and sensor masses, due to torques and Coholis forces generated, with an acceleration frequency and/or a rotation rate frequency.
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