发明公开
EP2445009A3 Photoelectric conversion device and image pickup system with photoelectric conversion device
审中-公开
的光电转换装置和成像系统的光电转换装置
- 专利标题: Photoelectric conversion device and image pickup system with photoelectric conversion device
- 专利标题(中): 的光电转换装置和成像系统的光电转换装置
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申请号: EP11195883.1申请日: 2007-07-04
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公开(公告)号: EP2445009A3公开(公告)日: 2013-11-13
- 发明人: Ura, Ken-ichiro , Fukumoto, Yoshihiko , Kataoka, Yuzo
- 申请人: Canon Kabushiki Kaisha
- 申请人地址: 30-2 Shimomaruko 3-chome Ohta-ku Tokyo 146-8501 JP
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: 30-2 Shimomaruko 3-chome Ohta-ku Tokyo 146-8501 JP
- 代理机构: TBK
- 优先权: JP2006189244 20060710
- 主分类号: H01L27/146
- IPC分类号: H01L27/146
摘要:
A manufacturing method of a solid-state imaging apparatus, wherein the solid-state imaging apparatus comprises a photoelectric conversion element, a transfer gate electrode, a second semiconductor region, an element isolation region, and a wiring, arranged on the element isolation region, wherein the manufacturing method comprises a step of forming the second semiconductor region, by injecting an impurity ion, through a mask covering the wiring and the element isolation region and extending from the element isolation region to a part of an activation region, into a portion of the activation region not covered with the mask.
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