发明公开
EP2445009A3 Photoelectric conversion device and image pickup system with photoelectric conversion device 审中-公开
的光电转换装置和成像系统的光电转换装置

  • 专利标题: Photoelectric conversion device and image pickup system with photoelectric conversion device
  • 专利标题(中): 的光电转换装置和成像系统的光电转换装置
  • 申请号: EP11195883.1
    申请日: 2007-07-04
  • 公开(公告)号: EP2445009A3
    公开(公告)日: 2013-11-13
  • 发明人: Ura, Ken-ichiroFukumoto, YoshihikoKataoka, Yuzo
  • 申请人: Canon Kabushiki Kaisha
  • 申请人地址: 30-2 Shimomaruko 3-chome Ohta-ku Tokyo 146-8501 JP
  • 专利权人: Canon Kabushiki Kaisha
  • 当前专利权人: Canon Kabushiki Kaisha
  • 当前专利权人地址: 30-2 Shimomaruko 3-chome Ohta-ku Tokyo 146-8501 JP
  • 代理机构: TBK
  • 优先权: JP2006189244 20060710
  • 主分类号: H01L27/146
  • IPC分类号: H01L27/146
Photoelectric conversion device and image pickup system with photoelectric conversion device
摘要:
A manufacturing method of a solid-state imaging apparatus, wherein the solid-state imaging apparatus comprises a photoelectric conversion element, a transfer gate electrode, a second semiconductor region, an element isolation region, and a wiring, arranged on the element isolation region, wherein the manufacturing method comprises a step of forming the second semiconductor region, by injecting an impurity ion, through a mask covering the wiring and the element isolation region and extending from the element isolation region to a part of an activation region, into a portion of the activation region not covered with the mask.
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