发明授权
- 专利标题: Autofocus device with rotation unit
- 专利标题(中): 带旋转装置的自动对焦装置
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申请号: EP12151366.7申请日: 2012-01-17
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公开(公告)号: EP2482111B1公开(公告)日: 2018-03-07
- 发明人: Okabe, Kenji , Shimokawa, Seiji , Kitagawa, Kazuki
- 申请人: Mitutoyo Corporation
- 申请人地址: 20-1, Sakado 1-chome Takatsu-ku Kawasaki-shi, Kanagawa 213-8533 JP
- 专利权人: Mitutoyo Corporation
- 当前专利权人: Mitutoyo Corporation
- 当前专利权人地址: 20-1, Sakado 1-chome Takatsu-ku Kawasaki-shi, Kanagawa 213-8533 JP
- 代理机构: Hoffmann Eitle
- 优先权: JP2011017415 20110131
- 主分类号: G02B21/24
- IPC分类号: G02B21/24
摘要:
Provided is an autofocus device (400) comprising: an optical source (1); an optical unit (10;20) that allows emitted light from the optical source and object light from a measurement target (W) to pass through the same optical path, the optical unit being arranged between the optical source and the measurement target; and a detection unit (4A,4B) that performs focus detection by using the object light passed through the optical unit, wherein the optical unit comprises: a tube lens (11;21) that forms the emitted light into parallel light; a line-like image forming unit (12,13;22) that forms a line-like image (L1,L2) on a surface of the measurement target (W) by the parallel light from the tube lens; and a rotation unit (121,122;222) that rotates the line-like image.
公开/授权文献
- EP2482111A1 Autofocus device with rotation unit 公开/授权日:2012-08-01
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