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公开(公告)号：EP3098640A2
公开(公告)日：2016-11-30
申请号：EP16170080.2
申请日：2016-05-18
申请人： Mitutoyo Corporation
发明人： Okabe, Kenji , Nagahama, Tatsuya , Yaku, Toru , Ono, Kimitoshi
摘要： A telecentric optical apparatus that is capable of suppressing an increase in the number of components as well as achieving high precision optical axis alignment, is provided. The telecentric optical apparatus of the present invention is characterized in that it is provided with: a first telecentric lens surface that is provided on an object side; a second telecentric lens surface that is provided on an image side and that shares a focus position with the first telecentric lens surface; and an optical path trimming part that is provided, between the first telecentric lens surface and the second telecentric lens surface, in an outside region, which is located on a side further out than a light passing region having a center thereof located at the focus position, and that changes an optical path such that a light beam incident on the outside region is prevented from contributing to image formation.
摘要翻译： 提供了能够抑制部件数量增加以及实现高精度光轴对准的远心光学装置。 本发明的远心光学装置的特征在于具有：设置在物体侧的第一远心透镜面; 第二远心透镜表面，其设置在图像侧并与第一远心透镜表面共享聚焦位置; 以及光路修剪部，其设置在所述第一远心透镜表面和所述第二远心透镜表面之间的外部区域中，所述外部区域位于比其中心位于聚焦位置处的光通过区域更远的一侧 并且改变光路，从而防止入射在外部区域上的光束有助于图像形成。
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公开(公告)号：EP1336886A3
公开(公告)日：2004-06-23
申请号：EP03000585.4
申请日：2003-01-13
申请人： Mitutoyo Corporation
发明人： Okabe, Kenji
摘要： A telecentric lens system (3) including a front lens unit (G1), a rear lens unit (G2) which is disposed so that the front focal point of the rear lens unit coincides with the back focal point of the front lens unit, and a diaphragm mechanism (31) which is disposed at the location where the back focal point of the front lens unit (G1) and the front focal point of the rear lens unit (G2) coincide, and which comprises a numerical aperture changer (33,34) for changing the numerical aperture of the diaphragm mechanism (31). By changing the numerical aperture, the telecentric lens system (3) can be used in a wide range of applications from observations requiring a large focal depth to observations requiring high resolution. The invention provides the telecentric lens system (3) which can be used in observations for a wide range of applications and an image measuring device (1) including the telecentric lens system (3).
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公开(公告)号：EP2466293A1
公开(公告)日：2012-06-20
申请号：EP11194131.6
申请日：2011-12-16
申请人： Mitutoyo Corporation
发明人： Okabe, Kenji , Nagahama, Tatsuya , Kaneko, Nobuya
CPC分类号： G01N21/64 , G01N21/25 , G02B21/248
摘要： In an optical measuring device, the visual observation section 100 includes: a white light source 10 which emits white light; a first objective lens 40 arranged between the white light source 10 and measurement object W, through which the white light emitted from the white light source 10 and return light from the measurement object W transmit; a plurality of tube lenses 50 which change a magnification of the return light passing through the first objective lens 40 to a predetermined magnification; and a lens switching mechanism 60 which can selectively switch the tube lenses 50 so as to select one of the tube lenses 50 to be arranged on the return light, and the special observation section 200 includes: a special light source 110 which emits special light; and a second objective lens 150 arranged between the special light source 110 and measurement object W, through which the special light emitted from the special light source 110 and return light from the measurement object W transmit.
摘要翻译： 在光学测量装置中，目视观察部分100包括：发射白光的白光源10; 配置在白色光源10与被测定物W之间，使从白色光源10射出的白色光和来自测定对象物W的返回光透过的第一物镜40， 多个管透镜50，其将通过第一物镜40的返回光的倍率改变为预定倍率; 以及透镜切换机构60，其可以选择性地切换管透镜50以选择要布置在返回光上的管透镜50中的一个，并且特殊观察部200包括：发出特殊光的特殊光源110; 以及配置在特殊光源110和测定对象W之间的第2物镜150，来自特殊光源110的特殊光和来自测定对象W的返回光透过该第2物镜。
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公开(公告)号：EP1980816B1
公开(公告)日：2011-12-28
申请号：EP08007128.5
申请日：2008-04-10
申请人： Mitutoyo Corporation
CPC分类号： G02B21/0016 , G01B9/08 , G02B21/365
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公开(公告)号：EP2466293B1
公开(公告)日：2014-02-12
申请号：EP11194131.6
申请日：2011-12-16
申请人： Mitutoyo Corporation
发明人： Okabe, Kenji , Nagahama, Tatsuya , Kaneko, Nobuya
CPC分类号： G01N21/64 , G01N21/25 , G02B21/248
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公开(公告)号：EP2482111A1
公开(公告)日：2012-08-01
申请号：EP12151366.7
申请日：2012-01-17
申请人： Mitutoyo Corporation
发明人： Okabe, Kenji , Shimokawa, Seiji , Kitagawa, Kazuki
CPC分类号： G02B21/245
摘要： Provided is an autofocus device (400) comprising: an optical source (1); an optical unit (10;20) that allows emitted light from the optical source and object light from a measurement target (W) to pass through the same optical path, the optical unit being arranged between the optical source and the measurement target; and a detection unit (4A,4B) that performs focus detection by using the object light passed through the optical unit, wherein the optical unit comprises: a tube lens (11;21) that forms the emitted light into parallel light; a line-like image forming unit (12,13;22) that forms a line-like image (L1,L2) on a surface of the measurement target (W) by the parallel light from the tube lens; and a rotation unit (121,122;222) that rotates the line-like image.
摘要翻译： 提供了一种自动对焦装置（400），包括：光源（1）; 允许来自光源的发射光和来自测量对象（W）的物体光通过相同光路的光学单元（10; 20），光学单元布置在光源和测量对象之间; 以及通过使用通过所述光学单元的物体光进行焦点检测的检测单元（4A，4B），其中，所述光学单元包括：将所述发射的光形成为平行光的管透镜（11; 21） 通过来自管透镜的平行光在测量对象物（W）的表面上形成线状图像（L1，L2）的线状图像形成单元（12,13; 22） 以及旋转所述线状图像的旋转单元（121,122; 222）。
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公开(公告)号：EP1980816A1
公开(公告)日：2008-10-15
申请号：EP08007128.5
申请日：2008-04-10
申请人： Mitutoyo Corporation
CPC分类号： G02B21/0016 , G01B9/08 , G02B21/365
摘要： An optical measuring machine (1) includes a screen (11) having a reference line, a movable stage (12), a detector (121) for detecting a displacement of the stage (12), the first and second image-forming units (13, 14) for forming optical image(s) of a target object mounted on the stage (12) on the screen, and a storage (171) for storing the optical image(s). The first image-forming unit (13) includes an image pickup for picking up the optical image(s), an output unit for outputting the picked up optical image(s) in digital image data, and a projecting unit for projecting the optical image(s) on the screen (11) in accordance with the image data output by the output unit. The storage (171) stores the image data output by the output unit.
摘要翻译： 光学测量机（1）包括具有参考线的屏幕（11），可移动台（12），用于检测平台（12）的位移的检测器（121），第一和第二图像形成单元 13，14），用于形成安装在屏幕上的台（12）上的目标物体的光学图像，以及用于存储光学图像的存储器（171）。 第一图像形成单元（13）包括用于拾取光学图像的图像拾取器，用于输出数字图像数据中拾取的光学图像的输出单元和用于投影光学图像的投影单元 （11）根据由输出单元输出的图像数据。 存储器（171）存储由输出单元输出的图像数据。
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公开(公告)号：EP1336886A2
公开(公告)日：2003-08-20
申请号：EP03000585.4
申请日：2003-01-13
申请人： Mitutoyo Corporation
发明人： Okabe, Kenji
IPC分类号： G02B13/22
摘要： A telecentric lens system (3) including a front lens unit (G1), a rear lens unit (G2) which is disposed so that the front focal point of the rear lens unit coincides with the back focal point of the front lens unit, and a diaphragm mechanism (31) which is disposed at the location where the back focal point of the front lens unit (G1) and the front focal point of the rear lens unit (G2) coincide, and which comprises a numerical aperture changer (33,34) for changing the numerical aperture of the diaphragm mechanism (31). By changing the numerical aperture, the telecentric lens system (3) can be used in a wide range of applications from observations requiring a large focal depth to observations requiring high resolution. The invention provides the telecentric lens system (3) which can be used in observations for a wide range of applications and an image measuring device (1) including the telecentric lens system (3).
摘要翻译： 一种远心透镜系统（3），包括前透镜单元（G1），后透镜单元（G2），所述后透镜单元（G2）设置成使得所述后透镜单元的前焦点与所述前透镜单元的后焦点重合，以及 设置在前透镜单元（G1）的后焦点和后透镜单元（G2）的前焦点重合的位置处的光阑机构（31），其包括数值孔径变换器（33， 34），用于改变隔膜机构（31）的数值孔径。 通过改变数值孔径，远心透镜系统（3）可以在广泛的应用中使用，需要大焦点深度观测需要高分辨率。 本发明提供了可用于广泛应用的观察的远心透镜系统（3）和包括远心透镜系统（3）的图像测量装置（1）。
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公开(公告)号：EP2482111B1
公开(公告)日：2018-03-07
申请号：EP12151366.7
申请日：2012-01-17
申请人： Mitutoyo Corporation
发明人： Okabe, Kenji , Shimokawa, Seiji , Kitagawa, Kazuki
IPC分类号： G02B21/24
CPC分类号： G02B21/245
摘要： Provided is an autofocus device (400) comprising: an optical source (1); an optical unit (10;20) that allows emitted light from the optical source and object light from a measurement target (W) to pass through the same optical path, the optical unit being arranged between the optical source and the measurement target; and a detection unit (4A,4B) that performs focus detection by using the object light passed through the optical unit, wherein the optical unit comprises: a tube lens (11;21) that forms the emitted light into parallel light; a line-like image forming unit (12,13;22) that forms a line-like image (L1,L2) on a surface of the measurement target (W) by the parallel light from the tube lens; and a rotation unit (121,122;222) that rotates the line-like image.
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公开(公告)号：EP3098640A3
公开(公告)日：2017-01-25
申请号：EP16170080.2
申请日：2016-05-18
申请人： Mitutoyo Corporation
发明人： Okabe, Kenji , Nagahama, Tatsuya , Yaku, Toru , Ono, Kimitoshi
摘要： A telecentric optical apparatus that is capable of suppressing an increase in the number of components as well as achieving high precision optical axis alignment, is provided. The telecentric optical apparatus of the present invention is characterized in that it is provided with: a first telecentric lens surface that is provided on an object side; a second telecentric lens surface that is provided on an image side and that shares a focus position with the first telecentric lens surface; and an optical path trimming part that is provided, between the first telecentric lens surface and the second telecentric lens surface, in an outside region, which is located on a side further out than a light passing region having a center thereof located at the focus position, and that changes an optical path such that a light beam incident on the outside region is prevented from contributing to image formation.
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